Patents by Inventor Young Hoon Lee, deceased

Young Hoon Lee, deceased has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fabrication process for a magnetic tunnel junction device
    Patent number: 6984529
    Abstract: A method of fabricating a magnetic tunnel junction (MTJ) device is provided. A patterned hard mask is oxidized to form a surface oxide thereon. An MTJ stack is etched in alignment with the patterned hard mask after the oxidizing of the patterned hard mask. Preferably, the MTJ stack etch recipe includes chlorine and oxygen. Etch selectivity between the hard mask and the MTJ stack is improved.
    Type: Grant
    Filed: September 10, 2003
    Date of Patent: January 10, 2006
    Assignees: Infineon Technologies AG, International Business Machines Corporation
    Inventors: George Stojakovic, Rajiv M. Ranade, Ihar Kasko, Joachim Neutzel, Keith R. Milkove, Russell D. Allen, Kim Poong Mee Lee, legal representative, Young Hoon Lee, deceased