Patents by Inventor Young Hua Xu

Young Hua Xu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • FILM FORMING MATERIAL AND METHOD OF FILM FORMING
    Publication number: 20090130326
    Abstract: An interlayer insulating film enabling an enhancement in a signal processing speed to be obtained, of which a dielectric constant is 2.2 or less. There is provided a method of forming a film on a substrate in accordance with a chemical vapor deposition process, comprising: the feeding step of feeding (c-C5H9)2Si(OCH3)2 by inert gas bubbling; and the deposition step of causing any of decomposition product resulting from decomposition of the (c-C5H9)2Si(OCH3)2 fed in the above feeding step to deposit on the substrate.
    Type: Application
    Filed: January 10, 2006
    Publication date: May 21, 2009
    Applicant: TRI CHEMICAL LABORATORIES INC.
    Inventors: Hideaki Machida, Ikuyo Muramoto, Young Hua Xu