Abstract: A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.

Abstract: An equipment diagnosis system and method, which use abnormal data and normal data of equipment and accurately and effectively perform diagnosis on the equipment, are provided. The equipment diagnosis system includes a data acquisition unit to acquire time series data of equipment, a preprocessing unit convert the time series data into frequency data including a temporal component through a Fourier transform, a deep learning unit to perform deep learning through a convolution neural network (CNN) by using the frequency data, and a diagnosis unit to determine a state of the equipment to be a normal state or a breakdown state based on the deep learning.

Abstract: A method for determining a position of a fault of equipment includes receiving a plurality of sound source signals from a plurality of sound source inputting apparatuses, determining an abnormal operation of the equipment by analyzing at least one sound source signal among the sound source signals, and extracting abnormal sound source signals from the sound source signals. The abnormal sound source signals are indicative of abnormal operation of the equipment. The method further includes determining a position of the abnormal operation based on a time difference between the abnormal sound source signals.

Abstract: A method of cleaning semiconductor equipment includes monitoring a state of a fluid in a pipeline of the semiconductor equipment, constructing a database by using data collected through the monitoring, diagnosing a state of the pipeline based on the data collected through the monitoring and stored in the database, and cleaning the pipeline by using an ultrasound wave when the state of the pipeline is diagnosed as being abnormal. The pipeline is cleaned by using at least two ultrasound wave generators.

Abstract: An equipment diagnosis system and method, which use abnormal data and normal data of equipment and accurately and effectively perform diagnosis on the equipment, are provided. The equipment diagnosis system includes a data acquisition unit to acquire time series data of equipment, a preprocessing unit convert the time series data into frequency data including a temporal component through a Fourier transform, a deep learning unit to perform deep learning through a convolution neural network (CNN) by using the frequency data, and a diagnosis unit to determine a state of the equipment to be a normal state or a breakdown state based on the deep learning.

Abstract: A lithium-ion battery having over-discharge protection includes an anode comprising at least an electrochemically active anode material, said anode having an anode irreversible capacity loss during a first charge of the lithium-ion battery; and a cathode comprising at least an electrochemically active cathode material characterized by the formula: xLi2MnO3.(1?x)LiMnaNibCocO2, where 0<x<1 and a+b+c=1, and x, a, b, and c are selected to provide a cathode irreversible capacity loss during a first charge of the lithium-ion battery that is greater than or equal to the anode irreversible capacity loss, and wherein the cathode possesses a voltage step less than about 2 V versus Li.

Abstract: A method for determining a position of a fault of equipment includes receiving a plurality of sound source signals from a plurality of sound source inputting apparatuses, determining an abnormal operation of the equipment by analyzing at least one sound source signal among the sound source signals, and extracting abnormal sound source signals from the sound source signals. The abnormal sound source signals are indicative of abnormal operation of the equipment. The method further includes determining a position of the abnormal operation based on a time difference between the abnormal sound source signals.

Abstract: Electroactive compositions are disclosed for use in lithium ion battery electrodes. The compositions, such as multifunctional mixed metal olivines, provide an electrochemical cell having a plurality of open circuit voltages at different states of charge. The compositions afford improved state-of-charge monitoring, overcharge protection and/or overdischarge protection for lithium ion batteries.

Abstract: Subassemblies for use in an electrochemical device are provided, as are processes for preparing the subassemblies and electrochemical cells incorporating the subassemblies. In some embodiments, the subassemblies include (a) a first electrode and (b) a separator or a first current collector or both. The first electrode is bonded to the separator or the first current collector or both. In some embodiments, the subassemblies further include a second electrode and a second current collector. In some embodiments, the electrodes or separators are sintered. Bipolar cells are also provided, including a plurality of stacked electrochemical cells that are joined in series. The positive electrode and the negative electrode of each stack include a sintered electrode.

Abstract: Improved positive electrode material and methods for making the same are described. Lithium-iron-manganese phosphate materials, doped with one or more dopant Co, Ni, V, and Nb, and methods for making the same are described. The improved positive electrode material of the present invention is capable of exhibiting improved energy density and/or specific capacity for use in wide range of applications. In certain embodiments, energy density of greater than 340 mWh/g is possible.

Abstract: Electroactive compositions are disclosed for use in lithium ion battery electrodes. The compositions, such as multifunctional mixed metal olivines, provide an electrochemical cell having a plurality of open circuit voltages at different states of charge. The compositions afford improved state-of-charge monitoring, overcharge protection and/or overdischarge protection for lithium ion batteries.

Abstract: Disclosed is a lithium titanate material, which may include an additive, and its use as an electrode in a battery. Specifically disclosed is a lithium titanate based material, with primary particle size larger than 100 nm, having very good high rate charge and discharge capabilities when incorporated into a lithium battery.

Abstract: A lithium-ion battery having over-discharge protection includes an anode comprising at least an electrochemically active anode material, said anode having an anode irreversible capacity loss during a first charge of the lithium-ion battery; and a cathode comprising at least an electrochemically active cathode material characterized by the formula: xLi2MnO3.(1?x)LiMnaNibCocO2, where 0<x<1 and a+b+c=1, and x, a, b, and c are selected to provide a cathode irreversible capacity loss during a first charge of the lithium-ion battery that is greater than or equal to the anode irreversible capacity loss, and wherein the cathode possesses a voltage step less than about 2 V versus Li.

Abstract: Subassemblies for use in an electrochemical device are provided, as are processes for preparing the subassemblies and electrochemical cells incorporating the subassemblies. In some embodiments, the subassemblies include (a) a first electrode and (b) a separator or a first current collector or both. The first electrode is bonded to the separator or the first current collector or both. In some embodiments, the subassemblies further include a second electrode and a second current collector. In some embodiments, the electrodes or separators are sintered. Bipolar cells are also provided, including a plurality of stacked electrochemical cells that are joined in series. The positive electrode and the negative electrode of each stack include a sintered electrode.

Abstract: Electroactive compositions are disclosed for use in lithium ion battery electrodes. The compositions, such as multifunctional mixed metal olivines, provide an electrochemical cell having a plurality of open circuit voltages at different states of charge. The compositions afford improved state-of-charge monitoring, overcharge protection and/or overdischarge protection for lithium ion batteries.

Abstract: Solid battery components are provided. A block copolymeric electrolyte is non-crosslinked and non-glassy through the entire range of typical battery service temperatures, that is, through the entire range of at least from about 0° C. to about 70° C. The chains of which the copolymer is made each include at least one ionically-conductive block and at least one second block immiscible with the ionically-conductive block. The chains form an amorphous association and are arranged in an ordered nanostructure including a continuous matrix of amorphous ionically-conductive domains and amorphous second domains that are immiscible with the ionically-conductive domains. A compound is provided that has a formula of LixMyNzO2. M and N are each metal atoms or a main group elements, and x, y and z are each numbers from about 0 to about 1. y and z are chosen such that a formal charge on the MyNportion of the compound is (4?x). In certain embodiments, these compounds are used in the cathodes of rechargeable batteries.

Abstract: Solid battery components are provided. A block copolymeric electrolyte is non-crosslinked and non-glassy through the entire range of typical battery service temperatures, that is, through the entire range of at least from about 0° C. to about 70° C. The chains of which the copolymer is made each include at least one ionically-conductive block and at least one second block immiscible with the ionically-conductive block. The chains form an amorphous association and are arranged in an ordered nanostructure including a continuous matrix of amorphous ionically-conductive domains and amorphous second domains that are immiscible with the ionically-conductive domains. A compound is provided that has a formula of LixMyNzO2. M and N are each metal atoms or a main group elements, and x, y and z are each numbers from about 0 to about 1. y and z are chosen such that a formal charge on the MyNz portion of the compound is (4-x). In certain embodiments, these compounds are used in the cathodes of rechargeable batteries.

Abstract: Solid battery components are provided. A block copolymeric electrolyte is non-crosslinked and non-glassy through the entire range of typical battery service temperatures, that is, through the entire range of at least from about 0° C. to about 70° C. The chains of which the copolymer is made each include at least one ionically-conductive block and at least one second block immiscible with the ionically-conductive block. The chains form an amorphous association and are arranged in an ordered nanostructure including a continuous matrix of amorphous ionically-conductive domains and amorphous second domains that are immiscible with the ionically-conductive domains. A compound is provided that has a formula of LixMyNzO2. M and N are each metal atoms or a main group elements, and x, y and z are each numbers from about 0 to about 1. y and z are chosen such that a formal charge on the MyNz portion of the compound is (4-x). In certain embodiments, these compounds are used in the cathodes of rechargeable batteries.

Abstract: Solid battery components are provided. A block copolymeric electrolyte is non-crosslinked and non-glassy through the entire range of typical battery service temperatures, that is, through the entire range of at least from about 0° C. to about 70° C. The chains of which the copolymer is made each include at least one ionically-conductive block and at least one second block immiscible with the ionically-conductive block. The chains form an amorphous association and are arranged in an ordered nanostructure including a continuous matrix of amorphous ionically-conductive domains and amorphous second domains that are immiscible with the ionically-conductive domains. A compound is provided that has a formula of LixMyNzO2. M and N are each metal atoms or a main group elements, and x, y and z are each numbers from about 0 to about 1. y and z are chosen such that a formal charge on the MyNz portion of the compound is (4?x). In certain embodiments, these compounds are used in the cathodes of rechargeable batteries.

Abstract: This invention concerns intercalation compounds and in particular lithium intercalation compounds which have improved properties for use in batteries. Compositions of the invention include particulate metal oxide material having particles of multicomponent metal oxide, each including an oxide core of at least first and second metals in a first ratio, and each including a surface coating of metal oxide or hydroxide that does not include the first and second metals in the first ratio formed by segregation of at least one of the first and second metals from the core. The core may preferably comprise LixMyNzO2 wherein M and N are metal atom or main group elements, x, y and z are numbers from about 0 to about 1 and y and z are such that a formal charge on MyNz portion of the compound is (4−x), and having a charging voltage of at least about 2.5V.