Patents by Inventor Young-Jo JEON

Young-Jo JEON has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10036947
    Abstract: Disclosed are a blankmask and a photomask, in which compositions of metal and light elements of a light-shielding film are controlled so that the light-shielding film can guarantee a light-shielding efficiency, increase an etching speed, become thinner, and have a minimum sheet-resistance. To this end, the blankmask according to the present invention includes at least a light-shielding film on a transparent substrate, and the light-shielding film includes a first light-shielding layer adjacent to the transparent substrate and a second light-shielding layer formed on the first light-shielding layer, in which the first and the second light-shielding film contains chrome (Cr) and molybdenum (Mo).
    Type: Grant
    Filed: October 8, 2015
    Date of Patent: July 31, 2018
    Assignee: S&S TECH CO., LTD.
    Inventors: Kee-Soo Nam, Cheol Shin, Jong-Hwa Lee, Chul-Kyu Yang, Min-Ki Choi, Chang-Jun Kim, Young-Jo Jeon
  • Publication number: 20170023854
    Abstract: Disclosed are a blankmask and a photomask, in which compositions of metal and light elements of a light-shielding film are controlled so that the light-shielding film can guarantee a light-shielding efficiency, increase an etching speed, become thinner, and have a minimum sheet-resistance. To this end, the blankmask according to the present invention includes at least a light-shielding film on a transparent substrate, and the light-shielding film includes a first light-shielding layer adjacent to the transparent substrate and a second light-shielding layer formed on the first light-shielding layer, in which the first and the second light-shielding film contains chrome (Cr) and molybdenum (Mo).
    Type: Application
    Filed: October 8, 2015
    Publication date: January 26, 2017
    Inventors: Kee-Soo NAM, Cheol SHIN, Jong-Hwa LEE, Chul-Kyu YANG, Min-Ki CHOI, Chang-Jun KIM, Young-Jo JEON