Abstract: Provided is a substrate processing method capable of preventing over-etching of a part of a stair-case structure due to an etching solution, when a barrier layer is selectively formed on a VNAND device having the stair-case structure. The substrate processing method includes: alternately stacking a first insulating layer and a second insulating layer; forming a stepped structure having an upper surface, a lower surface, and a side surface connecting the upper surface to the lower surface by etching the first insulating layer and the second insulating layer that are stacked; densifying the stepped structure; forming a barrier layer on the densified second insulating layer; and performing isotropic etching on at least a part of a sacrificial word line structure including the second insulating layer and the barrier layer. During etching the barrier layer at the isotropic etching step, the second insulating layer is not etched or etched a little to an ignorable degree.

Abstract: A lithium metal secondary battery including: an electrode assembly including a positive electrode, a lithium metal negative electrode, a separator interposed between the positive electrode and the lithium metal negative electrode, a protective layer interposed between the lithium metal negative electrode and the separator; and a non-aqueous electrolyte injected to the electrode assembly, wherein the protective layer includes a polymer having a sulfur chain group. A battery module including the lithium metal secondary battery is also disclosed.

Abstract: Provided is a flexible thin-film transistor using a two-dimensional semiconductor material, which includes: a flexible substrate; a channel formed on the flexible substrate and formed of a two-dimensional semiconductor material; a gate insulator and a gate electrode stacked sequentially on the channel; and source and drain electrodes formed on the channel as being spaced apart from the gate electrode.

Abstract: The present disclosure provides an apparatus and a method for manufacturing a continuous reactor type core-shell catalyst electrode, which may manufacture a large amount of continuous reactor type core-shell catalyst electrodes by improving coating efficiency of shell metal by using reaction chambers disposed in a circular shape or in a line.

Abstract: A substrate processing method includes forming a high surface tension liquid film by supplying high surface tension liquid on a substrate surface, replacing the high surface tension liquid film with low surface tension liquid by supplying the low surface tension liquid to a center area of a substrate so that the low surface tension liquid impinges on the high surface tension liquid film formed on the center area of the substrate, and supplying high surface tension liquid for a predetermined period of time during the supplying the low surface tension liquid.

Abstract: A hose forming apparatus is provided that can separate with minimum shape deformation when separating a hose after forming is complete. The hose shaping apparatus includes an insertion path configured to insert a hose in a longitudinal direction and to have a shape corresponding to that of the hose to be formed; and a fixing portion configured to fix the hose inserted into the insertion path, wherein the insertion path forms a straight insertion portion configured to insert a straight segment of the hose to be formed and a bending insertion portion configured to insert a bending segment of the hose, and the bending insertion portion has an additional angle further bent by 15 to 35° than an angle of the bending segment.

Abstract: Provided are a micro-porous hybrid film and a method for preparing the same, and more particularly, a micro-porous hybrid film capable of improving reliability of a battery by simultaneously improving thermal stability at a high temperature and water properties, and a method for preparing the same. In addition, the present invention relates to a micro-porous hybrid film suitable for a separator of a high capacity/high output lithium secondary battery capable of increasing production stability, long term stability, and performance of the battery by improving adhesive force between a micro-porous film and a coating layer and permeability and minimizing a water content by the coating layer.

Abstract: A holder and a lighting device including the holder are provided. The holder may include a holder body having a hole, an outlet provided in a side of the holder body, and a channel provided in the holder body to connect the hole with the outlet. The channel may include a first channel provided in a circumferential direction and having one side connected to the outlet, a second channel that guides one of two wires connected to a light source module to the first channel, and a third channel that guides another one of the two wires to the first channel.

Abstract: Provided is a substrate processing method capable of preventing over-etching of a part of a stair-case structure due to an etching solution, when a barrier layer is selectively formed on a VNAND device having the stair-case structure. The substrate processing method includes: alternately stacking a first insulating layer and a second insulating layer; forming a stepped structure having an upper surface, a lower surface, and a side surface connecting the upper surface to the lower surface by etching the first insulating layer and the second insulating layer that are stacked; densifying the stepped structure; forming a barrier layer on the densified second insulating layer; and performing isotropic etching on at least a part of a sacrificial word line structure including the second insulating layer and the barrier layer. During etching the barrier layer at the isotropic etching step, the second insulating layer is not etched or etched a little to an ignorable degree.

Abstract: Provided are a micro-porous hybrid film and a method for preparing the same, and more particularly, a micro-porous hybrid film capable of improving reliability of a battery by simultaneously improving thermal stability at a high temperature and water properties, and a method for preparing the same. In addition, the present invention relates to a micro-porous hybrid film suitable for a separator of a high capacity/high output lithium secondary battery capable of increasing production stability, long term stability, and performance of the battery by improving adhesive force between a micro-porous film and a coating layer and permeability and minimizing a water content by the coating layer.

Abstract: Provided are a micro-porous hybrid film and a method for preparing the same, and more particularly, a micro-porous hybrid film capable of improving reliability of a battery by simultaneously improving thermal stability at a high temperature and water properties, and a method for preparing the same. In addition, the present invention relates to a micro-porous hybrid film suitable for a separator of a high capacity/high output lithium secondary battery capable of increasing production stability, long term stability, and performance of the battery by improving adhesive force between a micro-porous film and a coating layer and permeability and minimizing a water content by the coating layer.

Abstract: The following disclosure relates to a microporous polyolefin composite film having excellent heat resistance and thermal stability, and a method for manufacturing the same. More particularly, the present invention relates to a microporous polyolefin composite film capable of improving stability and reliability of a battery by heat sealing an edge of a microporous film provided with a coating layer that includes a polymer binder and inorganic particles, and a method for manufacturing the same.

Abstract: Provided is a micro-porous polyolefin composite film, the micro-porous polyolefin composite film including a porous coating layer containing a polymer binder and inorganic particles, the polymer binder simultaneously employing an aqueous polymer and a non-aqueous polymer. The contents of the aqueous polymer and the non-aqueous polymer are controlled, and thus optimize heat resistance, adhesive strength, and the moisture content to thereby improve high-temperature stability, and, further, improve the adhesive strength to thereby improve stability in production, and minimize the moisture content to thereby improve reliability of a battery.

Abstract: Provided are a micro-porous hybrid film and a method for preparing the same, and more particularly, a micro-porous hybrid film capable of improving reliability of a battery by simultaneously improving thermal stability at a high temperature and water properties, and a method for preparing the same. In addition, the present invention relates to a micro-porous hybrid film suitable for a separator of a high capacity/high output lithium secondary battery capable of increasing production stability, long term stability, and performance of the battery by improving adhesive force between a micro-porous film and a coating layer and permeability and minimizing a water content by the coating layer.

Abstract: The following disclosure relates to a microporous polyolefin composite film having excellent heat resistance and thermal stability, and a method for manufacturing the same. More particularly, the present invention relates to a microporous polyolefin composite film capable of improving stability and reliability of a battery by heat sealing an edge of a microporous film provided with a coating layer that includes a polymer binder and inorganic particles, and a method for manufacturing the same.

Abstract: Provided is a micro-porous polyolefin composite film, the micro-porous polyolefin composite film including a porous coating layer containing a polymer binder and inorganic particles, the polymer binder simultaneously employing an aqueous polymer and a non-aqueous polymer. The contents of the aqueous polymer and the non-aqueous polymer are controlled, and thus optimize heat resistance, adhesive strength, and the moisture content to thereby improve high-temperature stability, and, further, improve the adhesive strength to thereby improve stability in production, and minimize the moisture content to thereby improve reliability of a battery.