Abstract: A sputter tray moving system includes a sputter tray, a guide disposed under the sputter tray and including a groove, a pulley engaged with the groove of the guide and a buffer member disposed between the sputter tray and the guide. The sputter tray is moved when the pulley engaged with the groove of the guide is rotated in a rotation direction.

Abstract: A sputter tray moving system includes a sputter tray, a guide disposed under the sputter tray and including a groove, a pulley engaged with the groove of the guide and a buffer member disposed between the sputter tray and the guide. The sputter tray is moved when the pulley engaged with the groove of the guide is rotated in a rotation direction.

Abstract: A module for supporting a substrate includes a frame, a substrate holding unit and a guide mask. The frame receives the substrate including a deposition surface, a rear surface corresponding to the deposition surface, and a side surface connecting the deposition surface with the rear surface. The rear surface is supported by the frame. The substrate holding unit faces the side surface and is combined with a side of the frame. The guide mask includes a guide member and a deposition prevention member. The guide member is combined with the substrate holding unit to cover a portion of the deposition surface. The guide member guides the substrate. The deposition prevention member is combined with the substrate holding unit. The deposition prevention member has greater length than the guiding member to cover the guiding member.

Abstract: An air current generated at a movement road does not flow into a shelf while a crane moves along the movement road since a system for manufacturing a flat display panel includes: a shelf positioned to both sides of a movement road, and accommodating a cassette; and a crane, moving along the movement road, transferring the cassette to the shelf and extracting the cassette therefrom; and a blocking pate mounted to both side portions of the crane so as to prevent air current from flowing into the crane.