Abstract: A substrate processing apparatus includes: a chamber having a sidewall; a susceptor configured to mount a substrate inside the chamber; an upper dome surrounding an upper surface of the chamber and formed of a transparent dielectric material; an antenna disposed above the upper dome to generate inductively-coupled plasma; and an electromagnetic wave shield housing disposed to surround the antenna, wherein the electromagnetic wave shield housing may be heated by a heater.

Abstract: A device includes: a display element layer disposed on a substrate, the display element layer including pixels; an encapsulation layer covering the display element layer; and a touch sensor disposed on the encapsulation layer. The touch sensor includes a first inorganic insulating layer disposed on the encapsulation layer; a first surface reinforcing layer formed by performing surface treatment on the first inorganic insulating layer and disposed on the first inorganic insulating layer; a first conductive layer disposed on the first surface reinforcing layer; a first organic insulating layer covering the first conductive layer; and a second conductive layer disposed on the first organic insulating layer and connected to the first conductive layer while penetrating the first organic insulating layer.

Abstract: Provided are a device and a method for monitoring substrates to determine a processed state of the substrates and inspecting presence of abnormality in the processed substrates. A device for inspecting substrates includes a substrate mounting part moving relative to the substrate and for mounting a substrate, a measurement part for monitoring the substrate, a control part configured to control a movement path of the measurement part so that at least some regions are monitored from positions different from each other with respect to a plurality of substrates, and an analysis part configured to determine presence of abnormality from monitoring information about the plurality of substrates.

Abstract: A display device includes first and second emitting layers of first and second organic layers, on first and second pixel electrodes, in first and second emission areas, respectively, a first bank layer defining the first and second emission areas, a second bank layer on the first bank layer and defining protruding tips, a first pattern of the first organic layer which is on the second bank layer, an inorganic layer on the first emitting layer and the first pattern, a metal pattern on the inorganic layer to surround the second emission area, and a second pattern of the second organic layer which is on the metal pattern to surround the second emission area. The second pattern and the metal pattern form an undercut structure.

Abstract: A system and a method for detecting misuse of the seat belt includes a sensor unit detecting an occupant seated on a seat and a seat belt and a controller detecting an occupant based on an image signal detected through the sensor unit while the seat belt is fastened, separately detecting a shoulder webbing and a lap webbing of the seat belt, and determining whether the seat belt is worn normally or abnormally based on the detected result to warn that the seat belt is abnormally worn.

Abstract: A system for measuring a depth of a stereoscopic image includes a display device displaying a stereoscopic image at a predetermined depth of field; a holographic camera generating an interference pattern image by sensing a wavelength and a phase of light of the stereoscopic image; and a control unit calculating a plurality of modulated image data having image information of the stereoscopic image at each depth of the plurality of depths based on the wavelength and the phase of the light, calculating edges of a field in each of the plurality of modulated image data to obtain edge detection values, calculating a modulated signal by arranging the edge detection values according to a depth in the each of the plurality of modulated image data, calculating a first maximum value of the modulated signal, and calculating a first depth corresponding to the first maximum value as the depth of field.

Abstract: Disclosed is a seat belt wireless communication system. The system includes a detection unit provided in each seat and detecting a first signal indicating whether or not a seat belt is fastened and a second indicating a battery state, a sub-control unit provided in the each seat and transmitting the first signal and the second signal through wireless communication; and a main control unit, performing the wireless communication with each of the sub-control units, causing the sub-control unit to wake up through the wireless communication, receiving the first signal and the second signal from the sub-control unit, determining whether or not a belt of the each seat is fastened and a charged state of a battery, and controlling an output through the first signal and the second signal.

Abstract: An apparatus of adjusting the height of a seat belt, which enables the height of a three-point-type seat belt to be adjusted according to the body shape of a child passenger, securing the safety of a child passenger as well as an adult passenger, includes a sliding rail vertically provided on a side of a seatback; and a slider including a belt ring to hang a shoulder belt, wherein the slider is engaged to the sliding rail and configured to vertically slide along the sliding rail, the belt ring being positioned on a top portion of the seatback in a state in which the slider is positioned on an upper end portion of the sliding rail.

Abstract: Provided are a device and a method for monitoring substrates to determine a processed state of the substrates and inspecting presence of abnormality in the processed substrates. A device for inspecting substrates includes a substrate mounting part moving relative to the substrate and for mounting a substrate, a measurement part for monitoring the substrate, a control part configured to control a movement path of the measurement part so that at least some regions are monitored from positions different from each other with respect to a plurality of substrates, and an analysis part configured to determine presence of abnormality from monitoring information about the plurality of substrates.

Abstract: A wiring substrate and a display device including the same are provided. The display device includes a first substrate including a display area and a pad area disposed on one side of the display area, and a plurality of conductive layers including a plurality of wires and conductive patterns disposed in the display area and the pad area on the first substrate, wherein at least one of the conductive layers includes a copper-indium alloy and comprises a metal layer having a grain size equal to or less than about 140 nm.

Abstract: A display device includes a display area and a pad area on a side of the display area, a plurality of conductive layers on a first substrate in the display area and the pad area and comprising a wiring and a conductive pattern, a via layer on the plurality of conductive layers, a plurality of electrodes on the via layer in the display area and spaced apart from each other, and a light emitting element on at least one of the plurality of electrodes. At least one of the conductive layers includes a first metal layer, a second metal layer on the first metal layer, and a third metal layer on the second metal layer. The second metal layer includes copper (Cu), the third metal layer includes a copper alloy, and a grain size of the third metal layer is smaller than a grain size of the second metal layer.

Abstract: Provided are a device and a method for monitoring substrates to determine a processed state of the substrates and inspecting presence of abnormality in the processed substrates. A device for inspecting substrates includes a substrate mounting part moving relative to the substrate and for mounting a substrate, a measurement part for monitoring the substrate, a control part configured to control a movement path of the measurement part so that at least some regions are monitored from positions different from each other with respect to a plurality of substrates, and an analysis part configured to determine presence of abnormality from monitoring information about the plurality of substrates.

Abstract: A display device comprises a via layer disposed on a substrate, a first electrode and a second electrode disposed on the via layer and spaced apart from each other, a first insulating layer disposed on the first electrode and the second electrode, light emitting elements disposed on the first insulating layer and disposed on the first electrode and the second electrode, a bank layer disposed on the first insulating layer and comprising a first opening in which the light emitting elements are disposed and a second opening spaced apart from the first opening, a second insulating layer disposed on the light emitting elements, and a first contact electrode and a second contact electrode disposed on the bank layer, the light emitting elements, and the second insulating layer while being spaced apart from each other.

Abstract: Disclosed is a seat belt wireless communication system. The system includes a detection unit provided in each seat and detecting a first signal indicating whether or not a seat belt is fastened and a second indicating a battery state, a sub-control unit provided in the each seat and transmitting the first signal and the second signal through wireless communication; and a main control unit, performing the wireless communication with each of the sub-control units, causing the sub-control unit to wake up through the wireless communication, receiving the first signal and the second signal from the sub-control unit, determining whether or not a belt of the each seat is fastened and a charged state of a battery, and controlling an output through the first signal and the second signal.

Abstract: Disclosed are a seat belt wireless communication system and method. The seat belt wireless communication system includes sensing units provided in respective seats and configured to sense whether or not to fasten seat belts, sub-ECUs provided in the respective seats and configured to transmit signals indicating whether or not to fasten the seat belts, sensed by the sensing units, through wireless communication, and a main ECU provided in a vehicle and configured to perform wireless communication with the respective sub-ECUs, to wake up the sub-ECUs through wireless communication, to determine whether or not to fasten the seat belts of the respective seats by receiving the signals from the sub-ECUs after wake-up of the sub-ECUs, and to determine, when the main ECU does not receive a corresponding one of the signals from at least one of the sub-ECUs B, that the corresponding sub-ECU has failed.

Abstract: A technology is provided that secures the straightness of an electromagnetic wave signal transmitted and received according to the fastening of a buckle. A wireless seatbelt reminder device includes a tunnel member that is disposed in parallel to a seat rail, and has a passage formed therein. A sub-transmission and reception unit transmits an electromagnetic wave signal in the longitudinal direction of the passage as a seatbelt is fastened to a buckle and a main transmission and reception unit receives the electromagnetic wave signal transmitted by the sub-transmission and reception unit inside the passage to transfer the electromagnetic wave signal to an integrated controller.

Abstract: A method of manufacturing a semiconductor device includes: forming a first stack structure; forming first holes penetrating the first stack structure; forming a second stack structure on the first stack structure; forming second holes penetrating the second stack structure; measuring first direction distances between edges of the first holes and edges of the second holes; and correcting a first direction position at which the second holes are to be formed. The second holes may include one of a first shift hole shifted in a positive first direction from a first hole and a second shift hole shifted in a negative first direction from a first hole.

Abstract: An apparatus of adjusting the height of a seat belt, which enables the height of a three-point-type seat belt to be adjusted according to the body shape of a child passenger, securing the safety of a child passenger as well as an adult passenger, includes a sliding rail vertically provided on a side of a seatback; and a slider including a belt ring to hang a shoulder belt, wherein the slider is engaged to the sliding rail and configured to vertically slide along the sliding rail, the belt ring being positioned on a top portion of the seatback in a state in which the slider is positioned on an upper end portion of the sliding rail.

Abstract: A display device includes conductive layers including wires and conductive patterns in a display area and a pad area, a via layer on the conductive layers, a first electrode and a second electrode on the via layer in the display area and spaced apart from each other, a first insulating layer on the first electrode and the second electrode, light emitting elements on the first electrode and the second electrode spaced apart from each other on the first insulating layer, and a first connection electrode on the first electrode and electrically contacting the light emitting elements, and a second connection electrode on the second electrode and electrically contacting the light emitting elements, each of the conductive layers includes a first metal layer and a second metal layer on the first metal layer, and the second metal layer contains copper and has a grain size of about 155 nm or less.

Abstract: A system for providing an alarm indicating a non-fastening state of a seatbelt of a vehicle is provided. The system includes a seatbelt part provided in a seat of the vehicle; a first controller connected in communication to the seatbelt part and configured to determine whether a buckle of the seatbelt part is fastened and a first sensor module connected to the first controller. The first sensor module includes a first transmitter configured to transmit a buckle fastening signal when the buckle is fastened. A second sensor module includes a first receiver that is configured to receive the buckle fastening signal from the first sensor module. A second controller is connected in communication to the second sensor module, and is configured to receive the buckle fastening signal and output an alarm indicating whether the seatbelt is fastened.