Abstract: An ink jet head substrate, an ink jet head and method of manufacturing the ink jet head substrate. The ink jet head substrate includes a supporting structure and at least one heat-generating resistor disposed on the supporting structure to generate a thermal energy to eject ink and made of metal carbon nitride. The metal carbon nitride is represented as a chemical formula of MxCyNz where M is metal, X is within about 20 through 80, Y is within about 3 through 25, and Z is within about 10 through 60, when X+Y+Z=100. Further, the heat-generating resistor has a resistivity of 300˜2000 ??·Cm.

Abstract: A method of manufacturing a monolithic inkjet printhead wherein the uniformity of the ink flow path is maintained by ensuring that the flow path forming layer and the nozzle layer are completely adhered to each other. The method includes forming a heater and electrode on a substrate, coating a negative photoresist on the substrate, and patterning the photoresist using a photolithography process to form an flow path forming layer that defines an ink flow path. The method further comprises steps for then forming a sacrificial layer so as to cover the flow path forming layer and then flattening upper surfaces of the flow path forming layer and the sacrificial layer using a chemical mechanical polishing (CMP) process such that when a nozzle layer is then formed, the flow path forming layer and the nozzle layer are completely adhered to each other.

Abstract: A heat transfer type ink-jet print head and a method of fabricating the same. A method of fabricating an ink-jet print head includes operations of sequentially laminating a heat generation layer and an electrode layer on a substrate, laminating a protective layer on the top surfaces of the electrode layer and the heat generation layer by sequentially laminating a first protective layer and a second protective layer on the top surfaces of the electrode layer and the heat generation layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer to form an ink chamber, wherein defects such as “pin-holes” generated during the formation of the first protective layer are removed by applying a plasma on the first protective layer, and the second protective layer is laminated on the top surface of the first protective layer after any defect produced when laminating the first protective layer is removed.

Abstract: A method of manufacturing a monolithic inkjet printhead. The method may include forming on a substrate a heater for heating ink and an electrode for supplying current to the heater, forming a passage forming layer that surrounds an ink passage by applying negative-type photoresist to the substrate and patterning the same, forming a sacrificial layer having a planarized top surface in a space surrounded by the passage forming layer by repeatedly applying a positive-type photoresist to the substrate having the passage forming layer and patterning the same by photolithography at least twice, forming a nozzle layer having a nozzle by applying a negative-type photoresist to the passage forming layer and the sacrificial layer and patterning the same, etching the substrate from the bottom surface thereof to be perforated and forming an ink supply hole, and removing the sacrificial layer.

Abstract: An ink-jet print head and a method of making the same comprising the steps of sequentially laminating a heating layer and an electric conductive layer on a substrate, patterning the electric conductive layer to expose a predetermined area of the top surface of the heating layer, forming a protective layer on the top surfaces of the electric conductive layer and exposed heating layer, and laminating an ink chamber barrier and a nozzle plate on the top surface of the protective layer, thereby forming an ink chamber. The protective layer is provided by forming a cavitation layer by alternately laminating at least two types of thin film layers of different materials over the exposed heating layer and the electric conductive layer to resist fractures and oxidization resulting from use.