Patents by Inventor Young Wok Song

Young Wok Song has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Oxide pattern forming method and patterning method of semiconductor device
    Patent number: 7588996
    Abstract: An oxide pattern forming method comprises forming an oxide layer on a semiconductor substrate, implanting boron ions of not less than 1.0×1016 atoms/cm2 onto the oxide layer in a given region, and wet-etching the oxide layer in the remaining region where the boron ions are not implanted.
    Type: Grant
    Filed: June 29, 2007
    Date of Patent: September 15, 2009
    Assignee: Hynix Semiconductor Inc.
    Inventors: Hyo Geun Yoon, Woo Jin Kim, Dong Joo Kim, Ji Yong Park, Yong Soo Jung, Geun Min Choi, Young Wok Song, Sang Hyun Lee
  • Oxide Pattern Forming Method and Patterning Method of Semiconductor Device
    Publication number: 20080132073
    Abstract: An oxide pattern forming method comprises forming an oxide layer on a semiconductor substrate, implanting boron ions of not less than 1.0×1016 atoms/cm2 onto the oxide layer in a given region, and wet-etching the oxide layer in the remaining region where the boron ions are not implanted.
    Type: Application
    Filed: June 29, 2007
    Publication date: June 5, 2008
    Applicant: HYNIX SEMICONDUCTOR INC.
    Inventors: Hyo Geun Yoon, Woo Jin Kim, Dong Joo Kim, Ji Yong Park, Yong Soo Jung, Geun Min Choi, Young Wok Song, Sang Hyun Lee