Abstract: The present invention relates to an ultrasonic wave-driven triboelectric generator in which a self-gap is formed using plasma etching. The present invention relates to an ultrasonic wave-driven triboelectric generator having a polymer film as one triboelectric layer having a self-gap defined therein using plasma etching such that a surface area thereof is increased to achieve high power and miniaturization of the generator.

Abstract: A triboelectric energy generating device including: a first triboelectric layer made of a conductive material; a second triboelectric layer made of the ferroelectric composite, wherein the second triboelectric layer faces and is spaced apart from a friction face of the first triboelectric layer; and an outer wall surrounding at least a portion of each of the first triboelectric layer and the second triboelectric layer. The ferroelectric composite includes a polymer matrix and ferroelectric particles dispersed in the polymer matrix. When the ultrasonic wave is applied to the device, the first triboelectric layer and the second triboelectric layer repeatedly contact and are spaced from each other to generate the triboelectric energy. When the ultrasonic wave is applied to the device, an electric field is generated to maintain a polarized state of the ferroelectric particles to maintain an output of the triboelectric energy.