Patents by Inventor Young Hun Paik

Young Hun Paik has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Deposition method using a uniform electric field
    Patent number: 7517562
    Abstract: A deposition method includes placing a substrate on a susceptor inside a chamber, the susceptor including a center pin passing through the susceptor for lifting the substrate, energizing an electrode to applying a uniform electric field to the substrate, electrically connecting a ground member extending along and attached to an entire axial length of the center pin to a ground voltage source, and forming a film on the substrate by chemical vapor deposition.
    Type: Grant
    Filed: June 30, 2006
    Date of Patent: April 14, 2009
    Assignee: LG Display Co., Ltd.
    Inventor: Young Hun Paik
  • Chemical vapor deposition apparatus having a susceptor with a grounded lift pin
    Patent number: 7081165
    Abstract: A chemical vapor deposition apparatus includes a ground voltage source, a susceptor for placing a substrate, a center pin passing through the susceptor for lifting the substrate, and a ground member for connecting the center pin to the ground voltage source.
    Type: Grant
    Filed: May 15, 2002
    Date of Patent: July 25, 2006
    Assignee: LG.Philips LCD Co., Ltd.
    Inventor: Young Hun Paik
  • Chemical vapor deposition apparatus
    Publication number: 20020170498
    Abstract: A chemical vapor deposition apparatus includes a ground voltage source, a susceptor for placing a substrate, a center pin passing through the susceptor for lifting the substrate, and a ground member for connecting the center pin to the ground voltage source.
    Type: Application
    Filed: May 15, 2002
    Publication date: November 21, 2002
    Applicant: LG. Philips LCD Co., Ltd.
    Inventor: Young Hun Paik