Patents by Inventor Youngsam An

Youngsam An has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method of forming semiconductor devices
    Patent number: 8377206
    Abstract: An apparatus to form semiconductor devices includes an inner tube and an outer tube disposed to surround the inner tube. A plate is disposed at first open end of the inner tube to reduce variation between pressures at a first portion and a second portion inside the inner tube. The sum of areas of through-holes disposed on the plate is 10 to 60 percent of the entire area of the plate. The through-holes may include a first through-hole that is disposed at a central portion of the plate, and second through-holes disposed at an edge portion of the plate. The second through-holes are annularly arranged to surround the first through-hole.
    Type: Grant
    Filed: August 24, 2009
    Date of Patent: February 19, 2013
    Assignee: Samsung Electronics Co., Ltd
    Inventors: Youngsoo Park, Jungil Ahn, Myeongjin Kim, Sangyeob Cha, WanGoo Hwang, Youngsam An
  • APPARATUS AND METHOD OF FORMING SEMICONDUCTOR DEVICES
    Publication number: 20100064970
    Abstract: An apparatus to form semiconductor devices includes an inner tube and an outer tube disposed to surround the inner tube. A plate is disposed at first open end of the inner tube to reduce variation between pressures at a first portion and a second portion inside the inner tube. The sum of areas of through-holes disposed on the plate is 10 to 60 percent of the entire area of the plate. The through-holes may include a first through-hole that is disposed at a central portion of the plate, and second through-holes disposed at an edge portion of the plate. The second through-holes are annularly arranged to surround the first through-hole.
    Type: Application
    Filed: August 24, 2009
    Publication date: March 18, 2010
    Applicant: Samsung Electronics Co., Ltd
    Inventors: Youngsoo PARK, Jungil Ahn, Myeongjin Kim, Sangyeob Cha, WanGoo Hwang, Youngsam An