Abstract: An apparatus and method for measuring air currents on the surface of a substrate, which can accurately measure the magnitude and direction of air currents on the surface of a wafer with wafer-type air current measurement sensors, are provided. The apparatus includes: a first air current measurement module measuring a magnitude of air currents on a surface of a first substrate, which is processed in accordance with a semiconductor manufacturing process; a second air current measurement module measuring a movement direction of the air currents; and a power module supplying power to the first and second air current measurement modules, wherein the first air current measurement module, the second air current measurement module, and the power module are mounted on a second substrate, which has the same shape as the first substrate.

Abstract: A medium storage box according to an embodiment includes: a cassette body having a storage space in which a medium is stored; a cassette door coupled to the cassette body to open or close the storage space; a door opening detection unit for generating an open detection signal when the cassette door is opened; a microcomputer for determining that the cassette door is opened when receiving the open detection signal, and for storing the determined opening information of the cassette door in a cassette memory; and a battery for supplying power to the door detection unit and the microcomputer, wherein when the open detection signal is generated in the door opening detection unit, the battery supplies power to the microcomputer.

Abstract: A medium storage box according to an embodiment includes: a cassette body having a storage space in which a medium is stored; a cassette door coupled to the cassette body to open or close the storage space; a door opening detection unit for generating an open detection signal when the cassette door is opened; a microcomputer for determining that the cassette door is opened when receiving the open detection signal, and for storing the determined opening information of the cassette door in a cassette memory; and a battery for supplying power to the door detection unit and the microcomputer, wherein when the open detection signal is generated in the door opening detection unit, the battery supplies power to the microcomputer.

Abstract: A cassette mounting detection apparatus may include a cassette mounting unit configured to include a plurality of slots on which a plurality of cassettes is mounted and the mounting detection circuits of the respective slots and a main control unit configured to include a plurality of signal output terminals and a plurality of voltage detection terminals and to detect that at least one of the plurality of cassettes is mounted on any of the plurality of slots based on an output signal output through at least one of the plurality of signal output terminals and cassette voltages detected through at least one of the plurality of voltage detection terminals.

Abstract: A cassette mounting detection apparatus may include a cassette mounting unit configured to include a plurality of slots on which a plurality of cassettes is mounted and the mounting detection circuits of the respective slots and a main control unit configured to include a plurality of signal output terminals and a plurality of voltage detection terminals and to detect that at least one of the plurality of cassettes is mounted on any of the plurality of slots based on an output signal output through at least one of the plurality of signal output terminals and cassette voltages detected through at least one of the plurality of voltage detection terminals.

Abstract: Disclosed is a medium recognition apparatus for determining the type of a medium by using color information obtained by scanning the inserted medium, as well as a method for determining the type of a medium by using the apparatus. Color information and size information obtained by scanning only a partial region of a medium image, the hue of the medium image scanned by the image sensor, or RGB channel color information scanned by the color sensor is compared with pre-stored reference information to determine the type of the medium. This guarantees that the type of the medium is determined quickly and accurately based on simple comparing results.

Abstract: Disclosed is a medium recognition apparatus for determining the type of a medium by using color information obtained by scanning the inserted medium, as well as a method for determining the type of a medium by using the apparatus. Color information and size information obtained by scanning only a partial region of a medium image, the hue of the medium image scanned by the image sensor, or RGB channel color information scanned by the color sensor is compared with pre-stored reference information to determine the type of the medium. This guarantees that the type of the medium is determined quickly and accurately based on simple comparing results.