Abstract: A substrate processing apparatus includes a photoresist coater applying a photoresist film on a substrate, a humidifier increasing an amount of moisture in an ambient to which the photoresist film on the substrate is exposed, and an exposer irradiating the photoresist film exposed to the ambient having the increased amount of moisture with light. The humidifier is disposed between the photoresist coater and the exposer.

Abstract: A method for producing fermented shiitake mushroom sauce according to an embodiment includes adding lactose and sucrose to shiitake mushroom concentrate followed by inoculation of Pediococcus pentosaceus strain or Lactobacillus acidophilus strain and fermentation to prepare lactic acid bacteria fermented product of shiitake mushroom, and mixing the lactic acid bacteria fermented product of shiitake mushroom prepared above with hot pepper extract, garlic extract, onion extract, and shiitake mushroom block, water, salt, lemongrass, and coriander, and the present invention also relates to fermented shiitake mushroom sauce produced by the aforementioned method.