Abstract: Disclosed is a method for enrichment of NF3 gas, comprising: (a) feeding a gas mixture containing a low concentration of NF3 gas and impurities; and (b) passing the feed gas mixture through a non-porous membrane module, wherein an enriched NF3 gas mixture passing through the non-porous membrane module and an unenriched NF3 gas mixture failing to pass through the non-porous membrane module are separated depending on the differences in the kinetic diameters of the individual gases.

Abstract: Provided is a holder capable of a precise observation from 3 or more directions to analyze complicated internal structures of a specimen thereof, and more particularly, a specimen holder capable of a 3-axis movement for transmission electron microscope (TEM) 3D analysis that rotates cradles for supporting the specimen and moves the cradles back and forth and left and right, and freely changes directions of the specimen, thereby making it possible to more accurately analyze the specimen in three dimensions.

Abstract: The present invention relates to a cryo transfer holder for TEM including: a specimen support having a specimen rod with a specimen cradle provided on one side end thereof, while being airtightly inserted reciprocatingly on the other side end thereof into a cooling tube of a thermal insulating container, and a thermal insulating pipe configured to be fixed to the thermal insulating container on one side thereof and to surround the specimen rod except the specimen cradle at the time of observation. The thermal insulating container in which a cooling medium is contained has the cooling pipe penetrated thereinto. A specimen rod-reciprocating means is configured to be coupled to the side of the thermal insulating container to allow the specimen rod to be reciprocated relative to the thermal insulating container.

Abstract: Provided is a holder capable of a precise observation from 3 or more directions to analyze complicated internal structures of a specimen thereof, and more particularly, a specimen holder capable of a 3-axis movement for transmission electron microscope (TEM) 3D analysis that rotates cradles for supporting the specimen and moves the cradles back and forth and left and right, and freely changes directions of the specimen, thereby making it possible to more accurately analyze the specimen in three dimensions.

Abstract: Disclosed is a moon grid for transmission electron microscopy tomography, including a mesh sheet for protecting an upper objects and a support film formed on the mesh sheet and having nanoparticles dispersed throughout, in which the nanoparticles dispersed throughout the support film are used as reference points in the reconstruction of two-dimensional transmission electron microscopy images into a three-dimensional image, thus omitting a process of attaching markers in the course of preparation of a sample and easily forming reference points even on a sample to which it is impossible to attach markers. A method of fabricating such a moon grid is also provided.

Abstract: Disclosed is a moon grid for transmission electron microscopy tomography, including a mesh sheet for protecting an upper objects and a support film formed on the mesh sheet and having nanoparticles dispersed throughout, in which the nanoparticles dispersed throughout the support film are used as reference points in the reconstruction of two-dimensional transmission electron microscopy images into a three-dimensional image, thus omitting a process of attaching markers in the course of preparation of a sample and easily forming reference points even on a sample to which it is impossible to attach markers. A method of fabricating such a moon grid is also provided.