Patents by Inventor Younki Kim

Younki Kim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method to modify the shape of a cavity using angled implantation
    Patent number: 8450194
    Abstract: A method of modifying a shape of a cavity in a substrate. The method includes forming one or more cavities on a surface of the substrate between adjacent relief structures. The method also includes directing ions toward the substrate at a non-normal angle of incidence, wherein the ions strike an upper portion of a cavity sidewall, and wherein the ions do not strike a lower portion of the cavity sidewall. The method further includes etching the one or more cavities wherein the upper portion of a cavity sidewall etches more slowly than the lower portion of the sidewall cavity.
    Type: Grant
    Filed: July 1, 2011
    Date of Patent: May 28, 2013
    Assignee: Varian Semiconductor Equipment Associates, Inc.
    Inventors: Andrew Waite, Younki Kim, Stanislav Todorov
  • METHOD TO MODIFY THE SHAPE OF A CAVITY USING ANGLED IMPLANTATION
    Publication number: 20130001698
    Abstract: A method of modifying a shape of a cavity in a substrate. The method includes forming one or more cavities on a surface of the substrate between adjacent relief structures. The method also includes directing ions toward the substrate at a non-normal angle of incidence, wherein the ions strike an upper portion of a cavity sidewall, and wherein the ions do not strike a lower portion of the cavity sidewall. The method further includes etching the one or more cavities wherein the upper portion of a cavity sidewall etches more slowly than the lower portion of the sidewall cavity.
    Type: Application
    Filed: July 1, 2011
    Publication date: January 3, 2013
    Applicant: VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC.
    Inventors: Andrew Waite, Younki Kim, Stanislav Todorov