Patents by Inventor Yousuke NAGAHATA

Yousuke NAGAHATA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • High frequency power supply member and plasma processing apparatus
    Patent number: 11443922
    Abstract: A high frequency power supply member for supplying high frequency power includes: an inner conductor that forms a hollow; and an outer conductor arranged to surround the inner conductor, wherein a refrigerant flow path is provided inside a wall surface of at least one of the inner conductor and the outer conductor.
    Type: Grant
    Filed: June 16, 2021
    Date of Patent: September 13, 2022
    Assignee: Tokyo Electron Limited
    Inventors: Michishige Saito, Yousuke Nagahata
  • HIGH FREQUENCY POWER SUPPLY MEMBER AND PLASMA PROCESSING APPARATUS
    Publication number: 20210398782
    Abstract: A high frequency power supply member for supplying high frequency power includes: an inner conductor that forms a hollow; and an outer conductor arranged to surround the inner conductor, wherein a refrigerant flow path is provided inside a wall surface of at least one of the inner conductor and the outer conductor.
    Type: Application
    Filed: June 16, 2021
    Publication date: December 23, 2021
    Inventors: Michishige SAITO, Yousuke NAGAHATA