Patents by Inventor YOUYANG CHI

YOUYANG CHI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Immersion fluid recovery system and immersion fluid recovery method using said system
    Patent number: 12717241
    Abstract: An immersion fluid recovery system and method. The system includes a recovery cavity, a sealing extraction opening, a recovery flow path, a gas-liquid separator, and an orifice plate; the sealing extraction opening and recovery cavity are at a terminal objective lens and in an immersion fluid supply and recovery apparatus above a substrate; the sealing extraction opening is in the apparatus and oriented toward the substrate, the sealing extraction opening extracts immersion fluid from a gap between the apparatus and substrate, and extracts a gas at the radial outer side of the immersion fluid; the recovery cavity is inside the apparatus and communicates with the sealing extraction opening; the recovery cavity communicates with the gas-liquid separator; the orifice plate is in the recovery flow path and has through holes. The size of the through holes is less than that of a recovery pipe of the recovery flow path.
    Type: Grant
    Filed: November 5, 2020
    Date of Patent: August 25, 2026
    Assignee: ZHEJIANG CHEER TECHNOLOGY CO., LTD.
    Inventors: Xin Fu, Youyang Chi, Min Wu, Yuan Li, Jinjie Tong, Liang Du, Ning Xu, Wenyu Chen
  • IMMERSION FLUID RECOVERY SYSTEM AND IMMERSION FLUID RECOVERY METHOD USING SAID SYSTEM
    Publication number: 20230400774
    Abstract: An immersion fluid recovery system and an immersion fluid recovery method using said system.
    Type: Application
    Filed: November 5, 2020
    Publication date: December 14, 2023
    Inventors: XIN FU, YOUYANG CHI, MIN WU, YUAN LI, JINJIE TONG, LIANG DU, NING XU, WENYU CHEN