Abstract: The present invention provides an OLED material vacuum thermal evaporating mask plate, comprising a mask frame (1), a quickset (3) fixed on the mask frame (1) and a mask (5) fixed on the quickset (3); the mask frame (1) comprises four edges, and the four edges surround to form an opening corresponding to the mask (5); a surface of one side of the mask frame (1) close to the mask (5) is defined to be an upper surface, and each edge of the mask frame (1) comprises a groove (11); the quickset (3) is fixed in the groove (11), and an upper surface of the quickset (3) and an upper surface of the groove (11) are in the same plane; the mask (5) is fixed on the quickset (3) with spot welding and welding spots (7) are on the quickset (3); a width of the upper of the quickset (3) is smaller than a width of the quickset (3) positioned in the groove (11). When the mask deforms and the replacement is necessary, only the quickset is extracted for polishing or is replaced.

Abstract: The present invention is related with a heating vessel for preventing leakage of high temperature metal material and a manufacture method thereof. The heating vessel comprises: an internal heating vessel employed for containing metal material, an external heating vessel employed to be heated by a heating apparatus and a top cap having a vapor hole employed for escape of the vaporized metal material; the internal heating vessel is completely contained in the external heating vessel and positionally fixed relative to the external heating vessel, and an interspace exists between a side wall of the internal heating vessel and a side wall of the external heating vessel, and the top cap is fixed on tops of the internal heating vessel and the external heating vessel to cover opens of the internal heating vessel and the external heating vessel. The present invention also provides the manufacture method of the vessel.

Abstract: The present invention relates to a cleaning method and a cleaning apparatus for a mask. The cleaning method includes: step 1, providing a to-be-cleaned mask which is made of metal and has an organic material film attached thereto; step 2, heating the to-be-cleaned mask with microwave to break up the organic material film attached to the mask; step 3, stopping heating with microwave, and spraying the heated mask with a solution to remove off the broken organic material film from the mask; step 4, cleaning residual organic material film on the mask with a solution; step 5, rinsing the cleaned mask to wash off residual solution on the mask; step 6, drying the rinsed mask with microwave. Accordingly, the cleaning period of mask is dramatically shortened, the cleaning productivity is increased and the probability of material residue is decreased.

Abstract: The present invention provides a vacuum evaporation apparatus. The apparatus comprises a vacuum chamber; an evaporation source disposed in the interior of the vacuum chamber, and having an inner heat unit and an outer heat unit located outside; a material container formed at an inner wall of the inner heat unit; a vacuum intermediate layer formed between an outer wall of the inner heat unit and the inner wall of the outer heat unit; a first branch at the inner heat unit for allowing a vapor to pass through; and a second branch at the outer heat unit for allowing the vapor to pass through. The device can overcome the influence of the color purity of light by gap forming by the deformation at the middle of the mask by the gravity, and increase the heating uniformity of the evaporation material and the stability of the evaporation rate.

Abstract: The present invention provides a vacuum evaporation apparatus. The apparatus comprises a vacuum chamber; an evaporation source disposed in the interior of the vacuum chamber, and having an inner heat unit and an outer heat unit located outside; a material container formed at an inner wall of the inner heat unit; a vacuum intermediate layer formed between an outer wall of the inner heat unit and the inner wall of the outer heat unit; a first branch at the inner heat unit for allowing a vapor to pass through; and a second branch at the outer heat unit for allowing the vapor to pass through. The device can overcome the influence of the color purity of light by gap forming by the deformation at the middle of the mask by the gravity, and increase the heating uniformity of the evaporation material and the stability of the evaporation rate.

Abstract: A heating device for detecting and preventing a high-temperature metal material from leaking includes an inner heating container for containing the high-temperature metal material, an outer heating container disposed outside the inner heating container, multiple terminals disposed at a bottom of the inner heating container and disposed without contacting a bottom of the outer heating container, an insulation connector connecting the inner heating container and the outer heating container, a power source; and an indication device. When the high-temperature metal material is leaked to the outer heating container, one or more of the multiple terminals contact the leaked high-temperature metal material to electrically connect the inner heating container, the outer heating container, the power source, and the indication device, and to trigger the indication device to work in order to determine that the high-temperature metal material is leaked and executing steps timely to prevent from leaking further.

Abstract: The present invention is related with a heating vessel of detecting and preventing leakage of high temperature metal material and a manufacture method thereof. The heating vessel comprises: an internal heating vessel employed for containing metal material, an external heating vessel employed to contain the internal heating vessel and to be heated by a heating apparatus and a detection apparatus; multiple bottom static wires are located between the internal heating vessel and the external heating vessel, where is close to the joint of a lateral side and a bottom of the internal heating vessel, and two ends of each of the bottom static wires are respectively connected to corresponding detection terminals on tops of the internal heating vessel and the external heating vessel, and the detection apparatus detects the material leakage by measuring resistance between the two detection terminals corresponding to the two adjacent ends of the two adjacent bottom static wires.

Abstract: The present invention provides a vacuum vapor deposition apparatus, comprising a vacuum chamber, a vapor deposition source disposed in the vacuum chamber, and a positioning unit arranged above the vapor deposition source; wherein the vapor deposition source includes a heating container and a heating unit; wherein the heating container includes a material container, a steam vessel, and an output unit successively arranged from bottom to top; wherein a first partition disposed between the material container and the steam vessel defines a first vent; wherein a second partition disposed between the steam vessel and the output unit defines a second vent; and wherein the caliber of the first vent is larger than the second vent.