Abstract: An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

Abstract: An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

Abstract: In a communication terminal including a playback device, an input device, a communication device, and a control device, the control device performs content presentation processing of acquiring a content from a content server and displaying the content, emotion data storage processing of storing, in the content server, at least a piece of emotion data of a user of the communication terminal, which is input in accordance with the content, tendency specification processing of acquiring the emotion data, which has been stored, from the content server, and specifying a tendency of a change over time on the basis of the emotion data, and recommendation content search processing of searching for a recommendation content to be recommended to the user on a basis of the emotion data and the tendency.

Abstract: In a communication terminal including a playback device, an input device, a communication device, and a control device, the control device performs content presentation processing of acquiring a content from a content server and displaying the content, emotion data storage processing of storing, in the content server, at least a piece of emotion data of a user of the communication terminal, which is input in accordance with the content, tendency specification processing of acquiring the emotion data, which has been stored, from the content server, and specifying a tendency of a change over time on the basis of the emotion data, and recommendation content search processing of searching for a recommendation content to be recommended to the user on a basis of the emotion data and the tendency.

Abstract: An original holding apparatus of a simple arrangement and an arrangement in which a part does not protrude below an original in a normal operation state is provided. The original holding apparatus includes an original holding unit which holds the original, and a fall prevention mechanism which changes from the first state in which fall prevention of the original from the original holding unit is not performed to the second state in which fall prevention of the original is performed in response to the stop or lack of supply of a holding force holding the original to the original holding unit.

Abstract: An imprint apparatus forms a pattern of a resin on a region to be processed of a substrate using a mold including a pattern region on which a pattern is formed and includes a correction unit configured to correct a shape of a target region that is either the pattern region on the mold or the region to be processed on the substrate, wherein the correction unit further includes: a heating unit configured to heat an object corresponding to the target region of either the mold or the substrate in a heating region having an area smaller than that of the pattern region on the mold; a scanning unit configured to scan the heating region with respect to the target region by changing the relative position of the target region and the heating region; and a control unit configured to acquire information regarding a correction deformation amount of the target region and control the heating unit and the scanning unit based on the information.

Abstract: An imprint apparatus includes plural pressing members configured to press a side surface of a mold and plural actuators configured to drive each pressing member in a direction parallel to the pattern surface. The each pressing member has a tapered portion on a side of the mold. A contact portion contacting the side surface of the mold out of the tapered portion extends in a direction perpendicular to the pattern surface.

Abstract: An imprint apparatus forms a pattern of a resin on a region to be processed of a substrate using a mold including a pattern region on which a pattern is formed and includes a correction unit configured to correct a shape of a target region that is either the pattern region on the mold or the region to be processed on the substrate, wherein the correction unit further includes: a heating unit configured to heat an object corresponding to the target region of either the mold or the substrate in a heating region having an area smaller than that of the pattern region on the mold; a scanning unit configured to scan the heating region with respect to the target region by changing the relative position of the target region and the heating region; and a control unit configured to acquire information regarding a correction deformation amount of the target region and control the heating unit and the scanning unit based on the information.