Patents by Inventor YS Suh

YS Suh has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Replacement metal gate transistors using bi-layer hardmask
    Patent number: 8748252
    Abstract: Methods of fabricating replacement metal gate transistors using bi-layer a hardmask are disclosed. By utilizing a bi-layer hardmask comprised of a first layer of nitride, followed by a second layer of oxide, the topography issues caused by transition regions of gates are mitigated, which simplifies downstream processing steps and improves yield.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: June 10, 2014
    Assignee: International Business Machines Corporation
    Inventors: Effendi Leobandung, William Cote, Laertis Economikos, Young-Hee Kim, Dae-Gyu Park, Theodorus Eduardus Standaert, Kenneth Jay Stein, YS Suh, Min Yang
  • REPLACEMENT METAL GATE TRANSISTORS USING BI-LAYER HARDMASK
    Publication number: 20140148003
    Abstract: Methods of fabricating replacement metal gate transistors using bi-layer a hardmask are disclosed. By utilizing a bi-layer hardmask comprised of a first layer of nitride, followed by a second layer of oxide, the topography issues caused by transition regions of gates are mitigated, which simplifies downstream processing steps and improves yield.
    Type: Application
    Filed: November 26, 2012
    Publication date: May 29, 2014
    Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
    Inventors: Effendi Leobandung, William Cote, Laertis Economikos, Young-Hee Kim, Dae-Gyu Park, Theodorus Eduardus Standaert, Kenneth Jay Stein, YS Suh, Min Yang