Abstract: A method for making and the product resulting from the method for making a microminiature electrical motor having a rotor rotatable about a fixed hub member within a surrounding stator, the diameter of the stator being typically in the range of 60-140 microns. Both synchronous and stepper motor configurations are described, each with structural features that provide increased performance and minimal rotor friction.

Abstract: A method and the product resulting from the method, for making a microminiature structure with two or more members measuring less than 1000 micrometers in any linear dimension and relatively movable to each other, comprising the steps of (a) providing a first sacrificial coating over a substrate having openings therethrough to expose a portion of the substrate, (b) depositing a first structural layer over the first sacrificial coating and the exposed portion of the substrate, with openings therethrough to expose a second portion of the substrate, (c) providing a second sacrificial coating over the second exposed portion of the substrate and said first structural layer, with openings through both the first and second sacrificial layers to expose a third portion of the substrate, (d) adding a second structural layer thereover and defining it, (e) possibly adding alternately other sacrificial coatings and other structural layers, and (f) etching the first and second and other sacrificial layers to remove them co