Patents by Inventor Yu Chao Lin

Yu Chao Lin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 12336192
    Abstract: A memory cell includes a bottom electrode, a memory element, spacers, a selector and a top electrode. The memory element is located on the bottom electrode and includes a first conductive layer, a second conductive layer and a storage layer. The first conductive layer is electrically connected to the bottom electrode. The second conductive layer is located on the first conductive layer, wherein a width of the first conductive layer is smaller than a width of the second conductive layer. The storage layer is located in between the first conductive layer and the second conductive layer. The spacers are located aside the second conductive layer and the storage layer. The selector is disposed on the spacers and electrically connected to the memory element. The top electrode is disposed on the selector.
    Type: Grant
    Filed: June 13, 2024
    Date of Patent: June 17, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Tung-Ying Lee, Yuan-Tien Tu, Jung-Piao Chiu
  • Patent number: 12324362
    Abstract: A method includes forming a dielectric layer over a substrate, the dielectric layer having a top surface; etching an opening in the dielectric layer; forming a bottom electrode within the opening, the bottom electrode including a barrier layer; forming a phase-change material (PCM) layer within the opening and on the bottom electrode, wherein a top surface of the PCM layer is level with or below the top surface of the dielectric layer; and forming a top electrode on the PCM layer.
    Type: Grant
    Filed: January 26, 2024
    Date of Patent: June 3, 2025
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Tung Ying Lee, Yu Chao Lin, Shao-Ming Yu
  • Publication number: 20250176442
    Abstract: A memory cell includes a bottom electrode, a top electrode, and a variable resistance layer. The top electrode is disposed over the bottom electrode. The variable resistance layer is sandwiched between the bottom electrode and the top electrode. A first portion of a bottom surface of the variable resistance layer and a second portion of the bottom surface of the variable resistance layer are parallel to each other and are located at different level heights.
    Type: Application
    Filed: January 17, 2025
    Publication date: May 29, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Tung-Ying Lee, Da-Ching Chiou
  • Publication number: 20250176443
    Abstract: A memory device includes a memory cell, a protection coating, and a first sidewall spacer. The memory cell is disposed over an inter-metal dielectric (IMD) layer. The memory cell includes a bottom electrode, a top electrode and a resistance-switchable structure between the top electrode and the bottom electrode. The protection coating is on an outer sidewall of the resistance-switchable structure. The protection coating consists of a binary compound of carbon and hydrogen. The first sidewall spacer is on an outer sidewall of the protection coating. The first sidewall spacer has a greater nitrogen atomic concentration than the protection coating.
    Type: Application
    Filed: January 28, 2025
    Publication date: May 29, 2025
    Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chao LIN, Yuan-Tien TU, Shao-Ming YU, Tung-Ying LEE
  • Patent number: 12317515
    Abstract: A memory device and a semiconductor die are provided. The memory device includes single-level-cells (SLCs) and multi-level-cells (MLCs). Each of the SLCs and the MLCs includes: a phase change layer; and a first electrode, in contact with the phase change layer, and configured to provide joule heat to the phase change layer during a programming operation. The first electrode in each of the MLCs is greater in footprint area as compared to the first electrode in each of the SLCs.
    Type: Grant
    Filed: August 4, 2022
    Date of Patent: May 27, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tung-Ying Lee, Shao-Ming Yu, Win-San Khwa, Yu-Chao Lin, Chien-Hsing Lee
  • Patent number: 12317761
    Abstract: A phase-change memory device and a method for fabricating the same are provided. The phase-change memory device comprises a first electrode, a stack and a multi-layered spacer. The first electrode is disposed on and electrically connected to an interconnect wiring of the interconnect structure. The stack is disposed on the first electrode and comprises a phase-change layer disposed on the first electrode and a second electrode disposed on the phase-change layer. The multi-layered spacer covers the stack. A first portion of the multi-layered spacer covers a top surface of the stack, and a second portion of the multi-layered spacer covers a sidewall of the stack.
    Type: Grant
    Filed: August 25, 2022
    Date of Patent: May 27, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Shao-Ming Yu, Yu-Chao Lin, Tung-Ying Lee
  • Publication number: 20250126881
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first active region and a second active region adjacent to the first active region, a first gate stack extending across the first active region in a first direction, an isolation feature extending across the second active region in the first direction; and a first gate-cut feature sandwiched between the first gate stack and the isolation feature.
    Type: Application
    Filed: December 18, 2024
    Publication date: April 17, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jin-Aun NG, Yu-Chao LIN, Tung-Ying LEE
  • Patent number: 12256654
    Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, a top electrode, and a storage element layer. The storage element layer is disposed between the bottom and top electrodes. An extending direction of a sidewall of the storage element layer is different from an extending direction of a sidewall of the top electrode. A semiconductor device having the memory cell is also provided.
    Type: Grant
    Filed: November 20, 2023
    Date of Patent: March 18, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Tung-Ying Lee
  • Patent number: 12245526
    Abstract: A phase change random access memory (PCRAM) device includes a memory cell overlying an inter-metal dielectric (IMD) layer, a protection coating, and a first sidewall spacer. The memory cell includes a bottom electrode, a top electrode and a phase change element between the top electrode and the bottom electrode. The protection coating is on an outer sidewall of the phase change element. The first sidewall spacer is on an outer sidewall of the protection coating. The first sidewall spacer has a greater nitrogen atomic concentration than the protection coating. The protection coating forms a first interface with the phase change element. The first interface has a first slope at a first position and a second slope at a second position higher than the first position, the second slope is different from the first slope.
    Type: Grant
    Filed: September 27, 2023
    Date of Patent: March 4, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
    Inventors: Yu-Chao Lin, Yuan-Tien Tu, Shao-Ming Yu, Tung-Ying Lee
  • Patent number: 12239031
    Abstract: A memory cell includes a dielectric structure, a storage element structure, and a top electrode. The storage element structure is disposed in the dielectric structure, and the storage element structure includes a first portion and a second portion. The first portion includes a first side and a second side opposite to the first side, where a width of the first side is less than a width of the second side. The second portion is connected to the second side of the first portion, where a width of the second portion is greater than the width of the first side. The top electrode is disposed on the storage element structure, where the second portion is disposed between the first portion and the top electrode.
    Type: Grant
    Filed: July 20, 2021
    Date of Patent: February 25, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Yu-Sheng Chen, Da-Ching Chiou
  • Patent number: 12238933
    Abstract: A semiconductor structure includes a base layer, a metal-containing gate, a high-k layer and a spacer. The metal-containing gate is disposed over the base layer. The high-k layer is disposed between the base layer and the metal-containing gate. The high-k layer has a protruding portion that protrudes out from a bottom of the metal-containing gate. The spacer is disposed on the sidewall of the metal-containing gate and covers the protruding portion of the high-k layer.
    Type: Grant
    Filed: January 20, 2022
    Date of Patent: February 25, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Chih-Sheng Chang
  • Patent number: 12237421
    Abstract: A semiconductor device structure is provided. The semiconductor device structure includes first nanostructures and second nanostructures formed over a substrate, and a first gate structure formed over the first nanostructures. The semiconductor device structure includes a second gate structure formed over the second nanostructures, and the second gate structure includes a gate dielectric layer, a first type work function layer and a filling layer. The semiconductor device structure includes a first isolation layer between the first gate structure and the second gate structure, and the first isolation layer includes a first sidewall surface, and the first sidewall surface is in direct contact with a first interface between the gate dielectric layer and the first type work function layer and a second interface between the work function layer and the filling layer.
    Type: Grant
    Filed: February 15, 2024
    Date of Patent: February 25, 2025
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Chao Lin, Wei-Sheng Yun, Tung-Ying Lee
  • Publication number: 20250063770
    Abstract: A semiconductor device including a substrate, a semiconductor layer, a gate, a dielectric structure, and a source/drain structure is provided. The semiconductor layer is disposed on the substrate, and is made of a first low dimensional material. The gate is disposed on the substrate and overlaps the semiconductor layer. The dielectric structure is disposed on the semiconductor layer and includes a trench structure reaching a portion of the semiconductor layer. The source/drain structure includes a barrier layer made of a second low dimensional material continuously extending along the trench structure and a metal fill filling a volume surrounded by the barrier layer.
    Type: Application
    Filed: August 16, 2023
    Publication date: February 20, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Jiun Lin, Tung-Ying Lee, Yu-Chao Lin
  • Publication number: 20250057057
    Abstract: A memory array, a semiconductor chip and a method for forming the memory array are provided. The memory array includes first signal lines, second signal lines and memory cells. The first signal lines extend along a first direction. The second signal lines extend along a second direction over the first signal lines. The memory cells are defined at intersections of the first and second signal lines, and respectively include a resistance variable layer, a switching layer, an electrode layer and a carbon containing dielectric layer. The switching layer is overlapped with the resistance variable layer. The electrode layer lies between the resistance variable layer and the switching layer. The carbon containing layer laterally surrounds a stacking structure including the resistance variable layer, the switching layer and the electrode layer.
    Type: Application
    Filed: October 28, 2024
    Publication date: February 13, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Jung-Piao Chiu
  • Publication number: 20250048941
    Abstract: Provided are a memory cell and a method of forming the same. The memory cell includes a bottom electrode, an etching stop layer, a variable resistance layer, and a top electrode. The etching stop layer is disposed on the bottom electrode. The variable resistance layer is embedded in the etching stop layer and in contact with the bottom electrode. The top electrode is disposed on the variable resistance layer. A semiconductor device having the memory cell is also provided.
    Type: Application
    Filed: October 24, 2024
    Publication date: February 6, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Carlos H. Diaz, Shao-Ming Yu, Tung-Ying Lee
  • Patent number: 12211844
    Abstract: A semiconductor structure is provided. The semiconductor structure includes a first gate-all-around FET over a substrate, and the first gate-all-around FET includes first nanostructures and a first gate stack surrounding the first nanostructures. The semiconductor structure also includes a first FinFET adjacent to the first gate-all-around FET, and the first FinFET includes a first fin structure and a second gate stack over the first fin structure. The semiconductor structure also includes a gate-cut feature interposing the first gate stack of the first gate-all-around FET and the second gate stack of the first FinFET.
    Type: Grant
    Filed: July 21, 2022
    Date of Patent: January 28, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jin-Aun Ng, Yu-Chao Lin, Tung-Ying Lee
  • Patent number: 12213388
    Abstract: A memory cell includes a bottom electrode, a first dielectric layer, a top electrode, and a variable resistance layer. The first dielectric layer laterally surrounds the bottom electrode. The top electrode is disposed over the bottom electrode and the first dielectric layer. The variable resistance layer is sandwiched between the bottom electrode and the top electrode and between the first dielectric layer and the top electrode. The variable resistance layer exhibits a T-shape in a cross-sectional view.
    Type: Grant
    Filed: September 21, 2023
    Date of Patent: January 28, 2025
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Chao Lin, Tung-Ying Lee, Da-Ching Chiou
  • Publication number: 20250031381
    Abstract: A method of forming a semiconductor device is provided. A first ferroelectric inducing layer including Ru is deposited on a substrate. A ferroelectric layer including HfZrO is deposited on the first ferroelectric inducing layer. A second ferroelectric inducing layer including Ru is deposited on the ferroelectric layer, wherein the HfZrO of the ferroelectric layer is in physical contact with the Ru of the first ferroelectric inducing layer and the Ru of the second ferroelectric inducing layer. The second ferroelectric inducing layer, the ferroelectric layer and the first ferroelectric inducing layer are patterned.
    Type: Application
    Filed: July 21, 2023
    Publication date: January 23, 2025
    Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Bo-Jiun Lin, Chih-Sheng Chang, Yu-Chao Lin, Tung-Ying Lee
  • Publication number: 20250023443
    Abstract: A feedback circuit is used for a power supply device. The power supply device includes a primary side circuit and a secondary side circuit. The feedback circuit includes a feedback voltage generation circuit, a base voltage generation circuit, and a compensation signal generation circuit. The feedback voltage generation circuit is electrically connected to the secondary side circuit. The feedback voltage generation circuit generates a feedback voltage according to a bias voltage and an output voltage of the power supply device. The base voltage generation circuit generates a base voltage according to the feedback voltage. The compensation signal generation circuit generates a compensation signal according to the feedback voltage and the base voltage and provides the compensation signal to a controller in the primary side circuit. A voltage value of the feedback voltage is lower than a voltage value of the bias voltage. The voltage value of the feedback voltage varies with the change of the output voltage.
    Type: Application
    Filed: August 8, 2023
    Publication date: January 16, 2025
    Applicant: Power Forest Technology Corporation
    Inventors: Yu-Chao Lin, Kuan-Chun Fang, Zhi-Yang Zhang, Chien-Wei Kuan
  • Publication number: 20250016485
    Abstract: A microphone stand structure includes a stand base, a frame set and a locking unit. The stand base includes a supporting rod, one end of the supporting rod includes a tapered groove and a first hole, the first hole penetrates the bottom of the tapered groove, and the inner wall of the tapered groove includes a first tooth part. A second hole penetrates a tapered convex part, a surface of the tapered convex part includes a second tooth part, the tapered convex part is fitted into the tapered groove, the second tooth part meshes with the first tooth part, and the second hole links to the first hole. The locking unit penetrates the first hole of the supporting rod and the second hole of the fastener.
    Type: Application
    Filed: July 5, 2024
    Publication date: January 9, 2025
    Inventors: Yu-Chao LIN, Chia-Sheng WANG, Ming-Chun LIN