Abstract: The present invention discloses a delivery equipment for the solid precursor particles, which is applied to the deposition of thin film. The delivery equipment for the solid precursor particles mainly comprises a container, a feeding material inlet, a feeding material tube, a feeding gas inlet, a feeding gas tube, and an output. A plurality of solid precursor particles are stored in the carrier liquid of the container, and then heated to be vapor, removed through the output of the container. The solid precursor particles are prepared by sublimation or grounding and uniformly dispersed in the carrier liquid. The disclosed delivery equipment for the solid precursor particles can reduce the required heating temperature, increase the thermal stability, prolong the used life time, and then increase the using efficiency of the precursors.