Patents by Inventor Yu-Chih Liou
Yu-Chih Liou has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8416555Abstract: A system for chucking and de-chucking a work piece comprises a wafer stage having a chuck support for supporting a chuck. The wafer stage further comprises a chuck mounted on the chuck support for receiving and attaching the work piece thereto; a support lift means for supporting the work piece; a driving means coupled to the support lift means for gradually raising the support lift means to contact the work piece in response to a variable quantity; a controller for receiving the variable quantity; and a regulating means coupled to the driving means and to the controller, the regulating means for controlling the variable quantity going to the driving means when a predetermined variable quantity is detected.Type: GrantFiled: July 25, 2011Date of Patent: April 9, 2013Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Tsung Lu, Pin-Chia Su, Yu-Chih Liou
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Publication number: 20110310525Abstract: A system for chucking and de-chucking a work piece comprises a wafer stage having a chuck support for supporting a chuck. The wafer stage further comprises a chuck mounted on the chuck support for receiving and attaching the work piece thereto; a support lift means for supporting the work piece; a driving means coupled to the support lift means for gradually raising the support lift means to contact the work piece in response to a variable quantity; a controller for receiving the variable quantity; and a regulating means coupled to the driving means and to the controller, the regulating means for controlling the variable quantity going to the driving means when a predetermined variable quantity is detected.Type: ApplicationFiled: July 25, 2011Publication date: December 22, 2011Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Tsung Lu, Pin-Chia Su, Yu-Chih Liou
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Patent number: 8000081Abstract: A wafer stage installed in a process chamber for safely dechucking a wafer is provided. In one embodiment, the wafer stage comprises: a chuck support for supporting a chuck; a chuck mounted on the chuck support for receiving and attaching a wafer thereto; a support lift means for supporting the wafer; a driving means coupled to the support lift means for gradually raising the support lift means to contact the wafer in response to a variable quantity; a sensor attached to the driving means for detecting a change in the variable quantity; and a controller for controlling the variable quantity to the driving means when a predetermined variable quantity is detected in comparison to the change in the variable quantity for a predetermined time.Type: GrantFiled: July 14, 2008Date of Patent: August 16, 2011Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Chung-Tsung Lu, Pin-Chia Su, Yu-Chih Liou
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Patent number: 7995323Abstract: A wafer stage installed in a process chamber for safely dechucking a wafer is provided. In one embodiment, the wafer stage comprises: a chuck support for supporting a chuck; a chuck mounted on the chuck support for receiving and attaching a wafer thereto; a support lift means for supporting the wafer; a driving means coupled to the support lift means for gradually raising the support lift means to contact the wafer in response to a variable quantity; a controller for receiving the variable quantity; and a regulating means coupled to the driving means and to the controller, the regulating means for controlling the variable quantity going to the driving means when a predetermined variable quantity is detected.Type: GrantFiled: July 14, 2008Date of Patent: August 9, 2011Assignees: Taiwan Semiconductor Manufacturing Co., Ltd., Lam ResearchInventors: Chung-Tsung Lu, Pin-Chia Su, Yu-Chih Liou
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Publication number: 20100008013Abstract: A wafer stage installed in a process chamber for safely dechucking a wafer is provided. In one embodiment, the wafer stage comprises: a chuck support for supporting a chuck; a chuck mounted on the chuck support for receiving and attaching a wafer thereto; a support lift means for supporting the wafer; a driving means coupled to the support lift means for gradually raising the support lift means to contact the wafer in response to a variable quantity; a sensor attached to the driving means for detecting a change in the variable quantity; and a controller for controlling the variable quantity to the driving means when a predetermined variable quantity is detected in comparison to the change in the variable quantity for a predetermined time.Type: ApplicationFiled: July 14, 2008Publication date: January 14, 2010Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.Inventors: Chung-Tsung LU, Pin-Chia SU, Yu-Chih LIOU
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Publication number: 20100008014Abstract: A wafer stage installed in a process chamber for safely dechucking a wafer is provided. In one embodiment, the wafer stage comprises: a chuck support for supporting a chuck; a chuck mounted on the chuck support for receiving and attaching a wafer thereto; a support lift means for supporting the wafer; a driving means coupled to the support lift means for gradually raising the support lift means to contact the wafer in response to a variable quantity; a controller for receiving the variable quantity; and a regulating means coupled to the driving means and to the controller, the regulating means for controlling the variable quantity going to the driving means when a predetermined variable quantity is detected.Type: ApplicationFiled: July 14, 2008Publication date: January 14, 2010Applicants: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD., LAM RESEARCHInventors: Chung-Tsung LU, Pin-Chia SU, Yu-Chih LIOU
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Publication number: 20040002299Abstract: The present invention provides a ventilation system and method that operates to remove outgassing of chemicals formed on a wafer during a wafer fabrication process to prevent contamination in a sealed wafer handling chamber. More particularly, the present invention discloses a ventilation system having a hood body having a gas supply conduit attached to a sealed outer side chamber of the ventilation hood such that contaminating particles in an interior of the hood are carried out by a purge gas flown into the hood interior through an inlet of the hood connected to the gas supply conduit into a facility vacuum exhaust system attached to an outlet of the hood. Preferably, the chamber is a load-lock chamber that operates to perform load lock processing on wafers and further operates to load and unload wafers to another location for further processing after using the ventilation system.Type: ApplicationFiled: June 27, 2002Publication date: January 1, 2004Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.Inventors: Mu-Tsang Lin, Yu-Chih Liou, Tu-Yi Chiu, Ji-Liang Wu, Wie-Liang Tsai