Patents by Inventor Yu-Chun Yu

Yu-Chun Yu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Scanner driven by piezoelectric actuators and method of making the same
    Patent number: 11831255
    Abstract: A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.
    Type: Grant
    Filed: April 18, 2021
    Date of Patent: November 28, 2023
    Assignee: ULTIMEMS, INC.
    Inventors: Yee-Chung Fu, Han-Tang Su, Yu-Chun Yu
  • SCANNER DRIVEN BY PIEZOELECTRIC ACTUATORS AND METHOD OF MAKING THE SAME
    Publication number: 20210333540
    Abstract: A scanner comprises a mirror, a first piezoelectric actuator, a second piezoelectric actuator, a third piezoelectric actuator, a fourth piezoelectric actuator, a first connecting member, a second connecting member, a first mirror spring, a second mirror spring, a stationary member, a first plurality of actuator springs, a second plurality of actuator springs, a third plurality of actuator springs, a fourth plurality of actuator springs, a first plurality of electrodes, and a second plurality of electrodes. The scanner is driven by piezoelectric actuators. A method of fabricating the scanner comprises the steps of providing a wafer; oxidation; deposition; patterning; and applying a singulation process.
    Type: Application
    Filed: April 18, 2021
    Publication date: October 28, 2021
    Inventors: Yee-Chung Fu, Han-Tang Su, Yu-Chun Yu