Abstract: A substrate transfer device includes: a traveling unit including a traveling wheel that travels on a rail to transfer a substrate in a first direction; a rail unit including the rail and a rail protrusion protruding from the rail in a second direction different from the first direction; and a sensor unit including a first sensor and a second sensor, wherein the first sensor senses the traveling unit, and the second sensor senses the rail protrusion, wherein the first and second sensors are placed at the same position as each other along the rail on a basis of the first direction.

Abstract: Disclosed is a hoist apparatus having an improved structure to load an object to be transported in a horizontal direction. The hoist apparatus includes a travel unit to travel along a rail, a carrier unit coupled to the travel unit so as to move in a first direction, and a cart unit coupled to the carrier unit so as to move in a second direction different from the first direction, wherein the cart unit includes a body portion, in which an object to be transferred is located, and a drive portion to drive the body portion in the second direction.

Abstract: A carrier transfer for automatically transferring a substrate carrier includes a gripper detachably coupled to the substrate carrier, the substrate carrier including a plurality of substrates and at least one open gate through which the plurality of substrates are loaded into or unloaded from the substrate carrier. The gripper includes a gate blocking unit secured to the gripper and configured to shift to a blocking position, the blocking position being a position of the gate blocking unit that partially blocks the gate to prevent the plurality of substrates from being separated from the substrate carrier during the automatic transferring of the substrate carrier.

Abstract: Disclosed is an automated-guided vehicle having a driver, comprising an emergency stop switch for selecting an emergency stop and a release of the emergency stop of the driver; a state detector part for detecting a selection state of the emergency stop switch; and an emergency stop driving circuit for stopping in emergency an operation of the driver or releasing the emergency stop thereof according to a detection signal from the state detector part. With this configuration, where an emergency situation such as stoppage of the CPU occurs, the driver of the AVG can be stopped by the emergency stop switch, and therefore, the AGV can be more safely stopped.

Abstract: Disclosed is an automated-guided vehicle having a driver, comprising an emergency stop switch for selecting an emergency stop and a release of the emergency stop of the driver; a state detector part for detecting a selection state of the emergency stop switch; and an emergency stop driving circuit for stopping in emergency an operation of the driver or releasing the emergency stop thereof according to a detection signal from the state detector part. With this configuration, where an emergency situation such as stoppage of the CPU occurs, the driver of the AGV can be stopped by the emergency stop switch, and therefore, the AGV can be more safely stopped.