Abstract: The method includes placing a wafer in a chamber body of a plasma processing tool; moving a first movable jig along an arc path to comb a spiral-shaped radio frequency (RF) coil over the chamber body, the first movable jig having a plurality of first confining slots penetrated by a plurality of coil segments of the spiral-shaped RF coil, respectively; and generating plasma in the chamber body through the spiral-shaped RF coil.

Abstract: The method includes placing a wafer in a chamber body of a plasma processing tool; moving a first movable jig along an arc path to comb a spiral-shaped radio frequency (RF) coil over the chamber body, the first movable jig having a plurality of first confining slots penetrated by a plurality of coil segments of the spiral-shaped RF coil, respectively; and generating plasma in the chamber body through the spiral-shaped RF coil.

Abstract: A curtain rod assembly includes an inner tube retractably inserted in an outer tube, and a first light source is connected with a first cap on an end of the inner tube. The outer tube has a second cap connected to an end thereof and a second light source is connected to the second cap. A locking sleeve is located between the inner and outer tubes so as to secure the inner tube relative to the outer tube. A first wire extends through the inner tube and connected between the first and second light sources. The second cap is electrically connected with a plug via a second wire so as to provide electric power to activate the first and second light sources.

Abstract: A light source locating and visualization apparatus comprises one or more than one LEDs capable to radiate a red light source with a wavelength of 600˜650 nm to locate superficial veins or specific structures; and a method of locating superficial veins with a LED light source comprises to proceed a skin-tightly radiating by using the source locating and visualization apparatus to emitting a red LED light source with wavelength of 600˜656 nm; to produce a lateral scattering and illumination effect by way of emitting red LED light source penetrating through a fat structure to cause reflection and scattering; and to locate superficial veins by naked eyes due to said superficial veins capable of absorbing red light spectrum easily and appearing as a located blood vessel shadow under the lateral scattering and illumination effect; therefore, physicians and nurse are capable by naked eyes to see the size, curve, and bifurcation of subcutaneous blood vessels visually and then select an appropriate injection position