Patents by Inventor Yu-il Lim

Yu-il Lim has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Systems and methods for removing residue from process gases exhausted from microelectronic device fabrication processes
    Patent number: 6019816
    Abstract: Process gases from microelectronic device fabrication processes are pumped through a filter unit including a plurality of absorbers for absorbing water entrained within the process gases. Residues deposited within the filtering unit are removed by spraying water on the absorbers. Water is prevented from escaping from the filtering unit into other portions of an exhaust gas system or into the environment by providing a curtain of pressurized, inert gas, within the filtering unit.
    Type: Grant
    Filed: May 28, 1998
    Date of Patent: February 1, 2000
    Assignee: Samsung Electronics Co., Ltd.
    Inventor: Yu-il Lim