Abstract: In a method of manufacturing a semiconductor device, a mask pattern is formed over a target layer to be etched, and the target layer is etched by using the mask pattern as an etching mask. The etching is performed by using an electron cyclotron resonance (ECR) plasma etching apparatus, the ECR plasma etching apparatus includes one or more coils, and a plasma condition of the ECR plasma etching is changed during the etching the target layer by changing an input current to the one or more coils.

Abstract: A blower housing assembly structure includes a locking base formed by aluminum die casting and two opposite casing covers disposed on both sides of the locking base respectively. The locking base has two opposite side connecting plates, each having a connection part formed at the top of the side connecting plate, and a side of each casing cover has an intake vent, and the two casing covers have two opposite half-extended pipe sections extending from the edges of the locking base connection part respectively, so that the half-extended pipe sections of the two casing covers are engaged to form an exhaust vent of a housing. This invention has the advantages of simple structure, easy assembling, effective alignment and high stability and the effects of preventing damages by vibration and reducing the noise during operation.

Abstract: A blower housing pressurization structure includes a power seat, a first joint, two half-shells, an air outlet, two air inlets, a second joint, a coupling key, and at least a guiding protrusion. Each half-shell is arranged on each side of the power seat. Each half-shell includes an outer side surface, an inner side surface, a first combination section and a second combination section. Each first combination section has a chamber for accommodating a wind impeller being positioned at each side of the power seat. Each second combination section is formed an air outlet for communicating to each chamber. The two air inlets are formed by an aperture penetrating each half-shell, and each air inlet is communicated to each chamber. At least one guiding protrusion is arranged on the inner side surface of each first combination section and corresponds to the wind impeller.

Abstract: A blower housing assembly structure includes a locking base formed by aluminum die casting and two opposite casing covers disposed on both sides of the locking base respectively. The locking base has two opposite side connecting plates, each having a connection part formed at the top of the side connecting plate, and a side of each casing cover has an intake vent, and the two casing covers have two opposite half-extended pipe sections extending from the edges of the locking base connection part respectively, so that the half-extended pipe sections of the two casing covers are engaged to form an exhaust vent of a housing. This invention has the advantages of simple structure, easy assembling, effective alignment and high stability and the effects of preventing damages by vibration and reducing the noise during operation.