Abstract: A collimated electron beam is illuminated to a grounded metal mask such that patterns on the mask can be transferred to a substrate identically. In a preferred embodiment, a linear electron source can be provided for enhancing lithographic throughput. The metal mask is adjacent to the substrate, but does not contact with substrate.

Abstract: This invention provides an x-y stage includes linear motors, linkages coupled to the linear motors respectively, a decoupling member coupling to the linkages movable in x-y directions freely, and a table fastened to the decoupling member. Coils or armatures of the linear motors can be fastened to the wall of vacuum chamber, such that heats generated in the coils can be conducted outside the vacuum chamber directly through the wall of the chamber. Cables for the coils or armatures are also fastened to the wall of chamber, and particle issue generated by the movable cable in the vacuum chamber can be removed.

Abstract: An epitaxial LED wafer is provided and chip process is processed such that each LED chip on the epitaxial wafer can be probed by an array of probe pin and results can be stored in a database. The epitaxial wafer is then diced on an expandable tape, and a display substrate is provided with driving circuits. The tape is expanded such that a pitch of LED chips on the tape is equal to a pitch of LED chips on display substrate. An array of drop pins will collectively and selectively drop LED chips, from the tape to the display substrate, with the same specification according to the probed results in the database.

Abstract: An immersion objective lens is configured below a stage such that multiple detectors can be configured above sample for large beam current application, particularly for defect inspection. Central pole piece of the immersion objective lens thus can be provided that a magnetic monopole-like field can be provided for electron beam. Auger electron detector thus can be configured to analyze materials of sample in the defect inspection.

Abstract: An epitaxial LED wafer is provided and chip process is processed such that each LED chip on the epitaxial wafer can be probed by an array of probe pin and results can be stored in a database. The epitaxial wafer is then diced on an expandable tape, and a display substrate is provided with driving circuits. The tape is expanded such that a pitch of LED chips on the tape is equal to a pitch of LED chips on display substrate. An array of drop pins will collectively and selectively drop LED chips, from the tape to the display substrate, with the same specification according to the probed results in the database.

Abstract: A collimated electron beam is illuminated to a grounded metal mask such that patterns on the mask can be transferred to a substrate identically. In a preferred embodiment, a linear electron source can be provided for enhancing lithographic throughput. The metal mask is adjacent to the substrate, but does not contact with substrate.

Abstract: An immersion objective lens is configured below a stage such that multiple detectors can be configured above sample for large beam current application, particularly for defect inspection. Central pole piece of the immersion objective lens thus can be provided that a magnetic monopole-like field can be provided for electron beam. Auger electron detector thus can be configured to analyze materials of sample in the defect inspection.

Abstract: A voice coil motor apparatus applied to an auto-focus or variable-focus lens module of a miniaturized camera includes: a voice coil motor, a plurality of steel guidance shafts, a lens holder, and a base. The voice coil motor also includes a magnetic part including magnets and yokes, and an electrical part including a coil winding. The magnetic part is rigidly coupled to the lens holder to form the moving member. The electrical part and the steel guidance shafts are fixed on the base to form the non-moving member. The pre-loaded force due to the interaction between the leakage flux of the magnetic part and the steel guidance shafts eliminates the free-play resulting from the tolerance gap between the moving and the non-moving members, and that the magnets and the yokes form a non-circular magnetic structure having a rectangular contour in order to minimize the overall dimension.

Abstract: A voice coil motor apparatus for positioning is disclosed. The voice coil motor is used by the auto-focus lens control module of a miniature camera. The apparatus contains a voice coil motor, a position feedback sensor, and a positioning controller. The voice coil of the voice coil motor can be either movable or stationary, where in the former case the attached power cable is a flexible circuit board, and in the latter case the power cable is fixed. The position feedback sensor includes a photo interrupter, a light reflector, and a bias circuit used for tracking any displacement of the movable part of the motor. The positioning controller uses the voltage signals to be processed through a proportional-integral-differential computation unit to manipulate an output current for accurate positioning of the movable part of the motor within a prescribed range.

Abstract: The present invention proposed a voice coil motor and a method of using magnetic restoring force for displacement control. The voice coil motor comprises a magnetic member and an electric member. The magnetic member generates a magnetic field. The electric member includes at least a coil and a ferromagnetic component. The coil can generate thrust when current is applied, and the ferromagnetic component can generate magnetic restoring force and normal coupling force. The voice coil motor further includes a suspension member, and is characterized in that the normal coupling force can preload the suspension member to eliminate the tilt angle and free play. Through the balance between the thrust generated by the coil current and the magnetic restoring force, open-loop displacement control can be accomplished without any elastic component.

Abstract: The present invention discloses a voice coil motor apparatus, especially one applied to an auto-focus or variable-focus lens module of a miniaturized camera. The voice coil motor apparatus of the present invention comprises: a voice coil motor, a plurality of steel guidance shafts, a lens holder, and a base. The voice coil motor includes a magnetic part, which further comprises magnets and yokes, and an electrical part, which further comprises a coil winding. The magnetic part is rigidly coupled to the lens holder to form the moving member of the apparatus. The electrical part and the steel guidance shafts are fixed on the base to form the non-moving member.

Abstract: A voice coil motor apparatus for positioning is disclosed. The voice coil motor is used by the auto-focus lens control module of a miniature camera. The apparatus contains a voice coil motor, a position feedback sensor, and a positioning controller. The voice coil of the voice coil motor can be either movable or stationary, where in the former case the attached power cable is a flexible circuit board, and in the latter case the power cable is fixed. The position feedback sensor includes a photo interrupter, a light reflector, and a bias circuit used for tracking any displacement of the movable part of the motor. The positioning controller uses the voltage signals to be processed through a proportional-integral-differential computation unit to manipulate an output current for accurate positioning of the movable part of the motor within a prescribed range.