Patents by Inventor Yu-Lin Du

Yu-Lin Du has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for temperature control in a rapid thermal processing system
    Patent number: 7368303
    Abstract: A method is disclosed for a multi-zone interference correction processing for a rapid thermal processing (RTP) system. This processing allows for improved calibration/tuning of RTP systems by accounting for zone coupling. The disclosed method includes establishing baseline characteristic data and zone characteristic data, and then using the baseline and zone characteristic data to determine lamp-control parameters, such as temperature offset values, for temperature sensors of the RTP system. The baseline characteristic data includes information regarding baseline heating uniformity of an RTP system. The zone characteristic data is collected for a plurality of heating zones within the heating chamber of the RTP system, each zone being associated with a respective temperature probe. The zone characteristic data is collected based on controlled temperature sensor variations.
    Type: Grant
    Filed: October 20, 2004
    Date of Patent: May 6, 2008
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Wei-Ming You, Shi-Ming Wang, Cheng Wei Chen, Jian-Hua Huang, Yu-Lin Du
  • Method for temperature control in a rapid thermal processing system
    Publication number: 20060084188
    Abstract: A method is disclosed for a multi-zone interference correction processing for a rapid thermal processing (RTP) system. This processing allows for improved calibration/tuning of RTP systems by accounting for zone coupling. The disclosed method includes establishing baseline characteristic data and zone characteristic data, and then using the baseline and zone characteristic data to determine lamp-control parameters, such as temperature offset values, for temperature sensors of the RTP system. The baseline characteristic data includes information regarding baseline heating uniformity of an RTP system. The zone characteristic data is collected for a plurality of heating zones within the heating chamber of the RTP system, each zone being associated with a respective temperature probe. The zone characteristic data is collected based on controlled temperature sensor variations.
    Type: Application
    Filed: October 20, 2004
    Publication date: April 20, 2006
    Inventors: Wei-Ming You, Shi-Ming Wang, Cheng Chen, Jian-Hua Huang, Yu-Lin Du