Patents by Inventor Yu-Mei Liao

Yu-Mei Liao has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11508739
    Abstract: A method of manufacturing a memory structure including the following steps is provided. A first pad layer is formed on a substrate. Isolation structures are formed in the first pad layer and the substrate. At least one shape modification treatment is performed on the isolation structures. Each shape modification treatment includes the following steps. A first etching process is performed on the first pad layer to reduce a height of the first pad layer and to form first openings exposing sidewalls of the isolation structures. After the first etching process is performed, a second etching process is performed on the isolation structures to modify shapes of the sidewalls of the isolation structures exposed by the first openings. The first pad layer is removed to form a second opening between two adjacent isolation structures.
    Type: Grant
    Filed: May 21, 2020
    Date of Patent: November 22, 2022
    Assignee: Powerchip Semiconductor Manufacturing Corporation
    Inventors: Hui-Chin Huang, Kai-Yao Shih, Yu-Mei Liao, Hsin-Yi Liao
  • Publication number: 20210320113
    Abstract: A method of manufacturing a memory structure including the following steps is provided. A first pad layer is formed on a substrate. Isolation structures are formed in the first pad layer and the substrate. At least one shape modification treatment is performed on the isolation structures. Each shape modification treatment includes the following steps. A first etching process is performed on the first pad layer to reduce a height of the first pad layer and to form first openings exposing sidewalls of the isolation structures. After the first etching process is performed, a second etching process is performed on the isolation structures to modify shapes of the sidewalls of the isolation structures exposed by the first openings. The first pad layer is removed to form a second opening between two adjacent isolation structures.
    Type: Application
    Filed: May 21, 2020
    Publication date: October 14, 2021
    Applicant: Powerchip Semiconductor Manufacturing Corporation
    Inventors: Hui-Chin Huang, Kai-Yao Shih, Yu-Mei Liao, Hsin-Yi Liao
  • Publication number: 20150325441
    Abstract: A semiconductor fabrication method is provided. A substrate having thereon a base layer, a hard mask layer, and a core layer is prepared. A resist pattern is transferred to the core layer, thereby forming a core pattern. The core pattern is subjected to a post-clean process. Thereafter, a spacer layer is deposited on the core pattern. The spacer layer is etched to form spacer pattern on each sidewall of the core pattern. The core pattern is then removed. The spacer pattern is transferred to the underlying hard mask layer and the base layer.
    Type: Application
    Filed: October 9, 2014
    Publication date: November 12, 2015
    Inventors: Hsin Tai, Yu-Mei Liao, Wei-Ting Liu, Wen-Chuan Peng
  • Patent number: 8822303
    Abstract: A method of fabricating a semiconductor component that including the following steps is provided. A plurality of stacked structures is formed on a substrate. A first dielectric layer is formed to cover the stacked structures, wherein the first dielectric layer has a plurality of overhangs, the overhangs wrap top portions of the stacked structures. A dry conformable etching process is performed to conformably remove the first dielectric layer until a portion of the first dielectric layer located outside of the overhangs is removed. A second dielectric layer is formed on the stacked structures, wherein the second dielectric layer connects the adjacent overhangs to form an air gap between the stacked structures.
    Type: Grant
    Filed: September 15, 2012
    Date of Patent: September 2, 2014
    Assignee: Powerchip Technology Corporation
    Inventors: Tsu-Chiang Chen, Yu-Mei Liao, Cheng-Kuen Chen
  • Publication number: 20140004665
    Abstract: A method of fabricating a semiconductor component that including the following steps is provided. A plurality of stacked structures is formed on a substrate. A first dielectric layer is formed to cover the stacked structures, wherein the first dielectric layer has a plurality of overhangs, the overhangs wrap top portions of the stacked structures. A dry conformable etching process is performed to conformably remove the first dielectric layer until a portion of the first dielectric layer located outside of the overhangs is removed. A second dielectric layer is formed on the stacked structures, wherein the second dielectric layer is connected to connects the adjacent overhangs to form an air gap between the stacked structures.
    Type: Application
    Filed: September 15, 2012
    Publication date: January 2, 2014
    Applicant: POWERCHIP TECHNOLOGY CORPORATION
    Inventors: Tsu-Chiang Chen, Yu-Mei Liao, Cheng-Kuen Chen
  • Publication number: 20100124729
    Abstract: A toothbrush includes: a hollow head portion defining a first fluid passage therein and having a bristle-mounting wall formed with a plurality of apertures in fluid communication with the first fluid passage; bristle bundles provided on the bristle-mounting wall, each of the bristle bundles being composed of a plurality of hollow bristles, each of the hollow bristles having a third fluid passage that has a connecting end in fluid communication with the first fluid passage and an open free end opposite to the connecting end; a hollow grip portion connected to the head portion and defining a second fluid passage therein, the second fluid passage being in fluid communication with the first fluid passage; and a suction unit connected to the grip portion and adapted to draw a fluid from an exterior of the bristle-mounting wall through the apertures and the third fluid passages.
    Type: Application
    Filed: November 5, 2009
    Publication date: May 20, 2010
    Inventors: Yu-Mei Liao, Fan-Hao Chou
  • Publication number: 20080166683
    Abstract: A toothbrush includes: a hollow head portion defining a first fluid passage therein and having a bristle-mounting wall formed with a plurality of apertures in fluid communication with the first fluid passage; bristles provided on the bristle-mounting wall of the head portion; a hollow grip portion connected to the head portion and defining a second fluid passage therein, the second fluid passage being in fluid communication with the first fluid passage; and a suction unit connected to the grip portion and adapted to draw a fluid from an exterior of the bristle-mounting wall of the hollow head portion through the apertures and the first and second fluid passages.
    Type: Application
    Filed: January 10, 2007
    Publication date: July 10, 2008
    Inventors: Yu-Mei Liao, Fan-Hao Chou