Patents by Inventor Yu-Ming Chuang

Yu-Ming Chuang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System for calculating exposure energy
    Patent number: 6535829
    Abstract: The present invention provides a system, comprising an exposure apparatus and a control mean electrically connected to the exposure apparatus, for calculating exposure energy (Ee). The control mean executes an exposure energy calculation program according to mask data, comprising an actual transparency percentage parameter (Ta) and a mask error, and a critical dimension (CD) specification, comprising at least a basic transparency percentage parameter (Tb), a transparency constant (Tc), a CD energy constant (Cc) and a basic exposure energy, to calculate the exposure energy and output the exposure energy to the exposure apparatus. In the exposure energy calculation program, the basic transparency percentage parameter (Tb) is firstly subtracted from the actual transparency percentage parameter (Ta). The resulting difference is then multiplied together with the transparency constant (Tc) parameter to calculate a transparency percentage difference energy.
    Type: Grant
    Filed: June 12, 2001
    Date of Patent: March 18, 2003
    Assignee: United Microelectronics Corp.
    Inventors: Wen-Chih Lee, Yu-Ming Chuang
  • System for calculating exposure energy
    Publication number: 20020188412
    Abstract: The present invention provides a system, comprising an exposure apparatus and a control mean electrically connected to the exposure apparatus, for calculating exposure energy (Ee). The control mean executes an exposure energy calculation program according to mask data, comprising an actual transparency percentage parameter (Ta) and a mask error, and a critical dimension (CD) specification, comprising at least a basic transparency percentage parameter (Tb), a transparency constant (Tc), a CD energy constant (Cc) and a basic exposure energy, to calculate the exposure energy and output the exposure energy to the exposure apparatus. In the exposure energy calculation program, the basic transparency percentage parameter (Tb) is firstly subtracted from the actual transparency percentage parameter (Ta). The resulting difference is then multiplied together with the transparency constant (Tc) parameter to calculate a transparency percentage difference energy.
    Type: Application
    Filed: June 12, 2001
    Publication date: December 12, 2002
    Inventors: Wen -Chih Lee, Yu-Ming Chuang