Abstract: The invention provides a light source optimization apparatus including a storage apparatus and a processor. The storage apparatus stores a plurality of modules. The processor is coupled to the storage apparatus and configured to execute the plurality of modules. The plurality of modules include a critical pattern module and a light source optimization module. The critical pattern module retrieves critical pattern data. The light source optimization module executes an ant colony optimization (ACO) algorithm according to a preset parameter to adjust an initial light source image to generate an output light source image, and the initial light source image corresponds to the critical pattern data.

Abstract: A method of manufacturing a semiconductor device includes forming a gate trench over a semiconductor substrate, depositing a gate dielectric layer and a work function layer in the gate trench, depositing a capping layer over the work function layer, passivating a surface portion of the capping layer to form a passivation layer, removing the passivation layer, depositing a fill layer in the gate trench, recessing the fill layer and the capping layer, and forming a contact metal layer above the capping layer in the gate trench.

Abstract: A frequency modulation feedback system applied to an actuation device composed of a carrier and a drive unit for driving the carrier. The frequency modulation feedback system includes: a feedback device for reading a feedback signal of the carrier and transmitting the feedback signal; a control section for receiving and reading the feedback signal to drive the drive unit; a passage, the feedback signal being transmitted from the feedback device via the passage to the control section; and a modulation device for modulating the waveform of the transmitted feedback signal. After the feedback device reads the feedback signal, the feedback device first transmits the feedback signal to the modulation device for the modulation device to change the waveform of the feedback signal. Then the feedback signal is transmitted via the passage to the control section for reading.