Patents by Inventor Yu-nung Chen

Yu-nung Chen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • ALKALINE CLEANING COMPOSITION, CLEANING METHOD, AND MANUFACTURING METHOD OF SEMICONDUCTOR
    Publication number: 20220206394
    Abstract: An alkaline cleaning composition is provided. The alkaline cleaning composition includes an alkaline compound, 5% to 40% by weight of propylene glycol monomethyl ether, 10% to 30% by weight of water, and a polar solvent. Wherein, the polar solvent includes acetals, glycol ethers, pyrrolidones, or a combination thereof, and the alkaline cleaning composition is free of benzenesulfonic acid.
    Type: Application
    Filed: December 23, 2021
    Publication date: June 30, 2022
    Applicant: Daxin materials corporation
    Inventors: Hui-yi Tang, Tzu-chi Wang, Yu-nung Chen, Yi-cheng Chen