Abstract: A method for predicting the polishing characteristics and life-span of a soft polishing pad includes the steps of: (a) establishing a matching database by means of performing a series of dynamic analysis tests on a new soft polishing pad by a contact probe at different frequencies and under different loads and detecting the surface reaction of the new soft polishing pad, (b) performing a dynamic analysis test on a to-be-tested soft polishing pad by a contact probe at a predetermined frequency and under a predetermined load and detecting the surface reaction of the to-be-tested soft polishing pad, and (c) comparing the surface reaction data of the to-be-tested soft polishing pad with the matching database and predicting the polishing characteristics and life-span of the to-be-tested soft polishing pad subject to the comparison result.