Patents by Inventor Yu-Shu Wang

Yu-Shu Wang has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11968908
    Abstract: In an embodiment, a method includes: forming a first inter-metal dielectric (IMD) layer over a semiconductor substrate; forming a bottom electrode layer over the first IMD layer; forming a magnetic tunnel junction (MTJ) film stack over the bottom electrode layer; forming a first top electrode layer over the MTJ film stack; forming a protective mask covering a first region of the first top electrode layer, a second region of the first top electrode layer being uncovered by the protective mask; forming a second top electrode layer over the protective mask and the first top electrode layer; and patterning the second top electrode layer, the first top electrode layer, the MTJ film stack, the bottom electrode layer, and the first IMD layer with an ion beam etching (IBE) process to form a MRAM cell, where the protective mask is etched during the IBE process.
    Type: Grant
    Filed: June 30, 2022
    Date of Patent: April 23, 2024
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Tai-Yen Peng, Hui-Hsien Wei, Han-Ting Lin, Sin-Yi Yang, Yu-Shu Chen, An-Shen Chang, Qiang Fu, Chen-Jung Wang
  • Patent number: 11944017
    Abstract: The present disclosure provides a semiconductor structure. The semiconductor structure includes an insulation layer. A bottom electrode via is disposed in the insulation layer. The bottom electrode via includes a conductive portion and a capping layer over the conductive portion. A barrier layer surrounds the bottom electrode via. A magnetic tunneling junction (MTJ) is disposed over the bottom electrode via.
    Type: Grant
    Filed: May 5, 2023
    Date of Patent: March 26, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
    Inventors: Tai-Yen Peng, Yu-Shu Chen, Chien Chung Huang, Sin-Yi Yang, Chen-Jung Wang, Han-Ting Lin, Jyu-Horng Shieh, Qiang Fu
  • Publication number: 20240099150
    Abstract: A method includes forming Magnetic Tunnel Junction (MTJ) stack layers, which includes depositing a bottom electrode layer; depositing a bottom magnetic electrode layer over the bottom electrode layer; depositing a tunnel barrier layer over the bottom magnetic electrode layer; depositing a top magnetic electrode layer over the tunnel barrier layer; and depositing a top electrode layer over the top magnetic electrode layer. The method further includes patterning the MTJ stack layers to form a MTJ; and performing a passivation process on a sidewall of the MTJ to form a protection layer. The passivation process includes reacting sidewall surface portions of the MTJ with a process gas comprising elements selected from the group consisting of oxygen, nitrogen, carbon, and combinations thereof.
    Type: Application
    Filed: November 28, 2023
    Publication date: March 21, 2024
    Inventors: Tai-Yen Peng, Yu-Shu Chen, Sin-Yi Yang, Chen-Jung Wang, Chien Chung Huang, Han-Ting Lin, Jyu-Horng Shieh, Qiang Fu
  • Patent number: 11475830
    Abstract: In some examples, the disclosure describes a device that includes a first light sensor to determine a first quantity of light at a first location; a second light sensor to determine a second quantity of light at a second location; a display device to display images; a processor; and a non-transitory memory resource storing machine-readable instructions stored thereon that, when executed, cause the processor to: determine when a difference between the first quantity of light and the second quantity of light device exceeds a threshold quantity, select a light sensor from the first light sensor and the second light sensor based on the first quantity of light received by the first light sensor and the second quantity of light received by the second light sensor, and alter a brightness of the display device based on the selected light sensor.
    Type: Grant
    Filed: July 28, 2021
    Date of Patent: October 18, 2022
    Assignee: Hewlett-Packard Development Company, L.P.
    Inventors: Yuan Hsi Cheng, Yu Shu Wang, Shu-Ting Hsu, Ming-Fong Chou
  • Patent number: 6206764
    Abstract: The present invention provides a method for machining hard materials using the machining fluids containing long chain alcohol in which the machining fluid is applied to a machining tool and then lubricates the machining of the workpiece by the machining tool and protects the machining tool during machining. The method is particularly useful when used with machining tools having a Mohs hardness of at least 9 and is most particularly useful when used with diamond machining tools.
    Type: Grant
    Filed: April 16, 1998
    Date of Patent: March 27, 2001
    Assignee: The United States of America as represented by the Secretary of Commerce
    Inventors: Stephen Hsu, Tsi-Neng Ying, Jia-Ming Gu, Yu-Shu Wang, Richard S. Gates