Patents by Inventor YU-SIANG FANG

YU-SIANG FANG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230411425
    Abstract: In some embodiments, the present disclosure relates to a method for forming an integrated chip (IC), including forming a plurality of image sensing elements including a first doping type within a substrate, performing a first removal process to form deep trenches within the substrate, the deep trenches separating the plurality of image sensing elements from one another, performing an epitaxial growth process to form an isolation epitaxial precursor including a first material within the deep trenches and to form a light absorbing layer including a second material different than the first material within the deep trenches and between sidewalls of the isolation epitaxial precursor, performing a dopant activation process on the light absorbing layer and the isolation epitaxial precursor to form a doped isolation layer including a second doping type opposite the first doping type, and filling remaining portions of the deep trenches with an isolation filler structure.
    Type: Application
    Filed: August 3, 2023
    Publication date: December 21, 2023
    Inventors: Yu-Hung Cheng, Ching I Li, Yu-Siang Fang, Yu-Yao Hsia, Min-Ying Tsai
  • Publication number: 20230378215
    Abstract: A cyclic pre-cleaning technique may be used to clean the surfaces of a recess in which a deep trench isolation (DTI) structure is to be formed. The cyclic pre-cleaning technique may include performing one or more deposition and etch cycles to remove oxygen from the surfaces of the recess to reduce the oxygen concentration in the surfaces of the recess. A passivation layer may be formed in the recess after the cyclic pre-cleaning technique is used to clean the surfaces. The cyclic pre-cleaning technique may include the use of germanium (Ge) to bond with oxygen in the surfaces of the recess, which results in the formation of germanium oxide (GeO). The germanium oxide is removed, resulting in reduced oxygen concentration in the surfaces of the recess. The reduced oxygen concentration increases the quality of epitaxial growth of the passivation layer in the recess.
    Type: Application
    Filed: May 17, 2022
    Publication date: November 23, 2023
    Inventors: Yu-Hung CHENG, Yu-Siang FANG, Ching I LI
  • Publication number: 20230369367
    Abstract: A boron layer may be formed as a passivation layer in a recess in which a deep trench isolation structure (DTI) structure is to be formed. The boron layer results in formation of a boron-silicon interface between the DTI structure and a photodiode of a pixel sensor included in a pixel array. The boron-silicon interface functions as a diode junction, which resists penetration of photons into the DTI structure. This reduces and/or minimizes photon transmission through the DTI structure, which reduces and/or minimizes optical crosstalk between pixel sensors of the pixel array.
    Type: Application
    Filed: May 12, 2022
    Publication date: November 16, 2023
    Inventors: Yu-Hung CHENG, Yu-Siang FANG, Yu-Yao HSIA, Ching I LI
  • Patent number: 11817469
    Abstract: In some embodiments, the present disclosure relates to a method for forming an integrated chip (IC), including forming a plurality of image sensing elements including a first doping type within a substrate, performing a first removal process to form deep trenches within the substrate, the deep trenches separating the plurality of image sensing elements from one another, performing an epitaxial growth process to form an isolation epitaxial precursor including a first material within the deep trenches and to form a light absorbing layer including a second material different than the first material within the deep trenches and between sidewalls of the isolation epitaxial precursor, performing a dopant activation process on the light absorbing layer and the isolation epitaxial precursor to form a doped isolation layer including a second doping type opposite the first doping type, and filling remaining portions of the deep trenches with an isolation filler structure.
    Type: Grant
    Filed: August 9, 2021
    Date of Patent: November 14, 2023
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Hung Cheng, Ching I Li, Yu-Siang Fang, Yu-Yao Hsia, Min-Ying Tsai
  • Publication number: 20220367535
    Abstract: In some embodiments, the present disclosure relates to a method for forming an integrated chip (IC), including forming a plurality of image sensing elements including a first doping type within a substrate, performing a first removal process to form deep trenches within the substrate, the deep trenches separating the plurality of image sensing elements from one another, performing an epitaxial growth process to form an isolation epitaxial precursor including a first material within the deep trenches and to form a light absorbing layer including a second material different than the first material within the deep trenches and between sidewalls of the isolation epitaxial precursor, performing a dopant activation process on the light absorbing layer and the isolation epitaxial precursor to form a doped isolation layer including a second doping type opposite the first doping type, and filling remaining portions of the deep trenches with an isolation filler structure.
    Type: Application
    Filed: August 9, 2021
    Publication date: November 17, 2022
    Inventors: Yu-Hung Cheng, Ching I Li, Yu-Siang Fang, Yu-Yao Hsia, Min-Ying Tsai
  • Patent number: 9298170
    Abstract: A watch capable of automatically turning on a backlight and a related method includes: providing a watch and one or more wearable device both supporting a wireless communication protocol, establishing a communication between the watch and the wearable device via the wireless communication protocol, measuring a signal strength related to the communication, determining whether a distance condition is satisfied based on the signal strength, and turning on a backlight of the watch when the distance condition is satisfied.
    Type: Grant
    Filed: September 8, 2015
    Date of Patent: March 29, 2016
    Assignee: MITAC INTERNATIONAL CORP.
    Inventor: Yu-Siang Fang
  • Publication number: 20160077496
    Abstract: A watch capable of automatically turning on a backlight and a related method includes: providing a watch and one or more wearable device both supporting a wireless communication protocol, establishing a communication between the watch and the wearable device via the wireless communication protocol, measuring a signal strength related to the communication, determining whether a distance condition is satisfied based on the signal strength, and turning on a backlight of the watch when the distance condition is satisfied.
    Type: Application
    Filed: September 8, 2015
    Publication date: March 17, 2016
    Applicant: MITAC INTERNATIONAL CORP.
    Inventor: YU-SIANG FANG