Abstract: A disinfection apparatus is adapted to disinfect a floor and includes a body and a disinfection assembly. The body is adapted to move along a default path via a moving device. The moving device is positioned at a bottom of the body and includes at least two floor contact parts. The floor contact parts are adapted to contact with the floor and form floor contact points on the floor, and the floor contact points form a track with actuation of the floor contact parts. The disinfection assembly is installed at the bottom of the body and is adapted to at least disinfect the track. Therefore, the disinfection apparatus is prevented from polluting an environment during disinfection.

Abstract: A disinfection module includes a base, a plurality of first angle adjustment elements, a plurality of first disinfection light sources and a driving element. The first angle adjustment elements are respectively disposed on the base. The first disinfection light sources are respectively connected to the first angle adjustment elements. The driving element is electrically connected to the first angle adjustment elements and is adapted to drive the first angle adjustment elements to rotate relative to the base, so as to change irradiation angles of the first disinfection light sources.

Abstract: A charging station is adapted to charge a robot. The robot has been in communication pairing with the charging station in advance. The charging station includes a body, a charging device, a control device and an alignment device. The charging device is arranged on the body and is adapted to connect to the robot. The control device is in communication connection with the robot and is in electric connection with the charging device and is provided with a sensing unit. The control device is adapted to enable the charging device to charge the robot after the sensing unit senses the robot. The alignment device is connected to the body and is adapted to align the robot with the charging station. Whereby, the robot is charged and position deviation of the robot during charging is prevented or electric shock accidents are prevented.

Abstract: Some implementations described herein provide a gas curtain system. The gas curtain system includes various components to prevent a gas flowing within a chamber of an interface tool from flowing through an opening into a transport carrier adjacent to the interface tool. The gas curtain system may include a gas distribution component along an edge of the opening that generates a flow of another gas across the opening towards an opposite edge of the opening. In this way, the gas from the chamber is prevented from entering the transport carrier. By preventing the gas from the chamber from entering the transport carrier, a relative humidity within an environment of the transport carrier is maintained such that condensation of moisture on one or more semiconductor wafers within the transport carrier is mitigated.

Abstract: In some implementations, one or more semiconductor processing tools may form a metal cap on a metal gate. The one or more semiconductor processing tools may form one or more dielectric layers on the metal cap. The one or more semiconductor processing tools may form a recess to the metal cap within the one or more dielectric layers. The one or more semiconductor processing tools may perform a bottom-up deposition of metal material on the metal cap to form a metal plug within the recess and directly on the metal cap.