Patents by Inventor Yu-Te Hung

Yu-Te Hung has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 8610230
    Abstract: A semiconductor device including a substrate and an anti-reflective coating disposed upon the substrate, the anti-reflective coating and the substrate forming an interface, a carbon concentration and a chlorine concentration less than an oxygen concentration at the interface.
    Type: Grant
    Filed: November 1, 2012
    Date of Patent: December 17, 2013
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Jun-Nan Nian, Shih-Chieh Chang, Chi-Cherng Jeng, Shiu-Ko JangJian, Yu-Te Hung