Patents by Inventor Yu-Ting Yen

Yu-Ting Yen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20250081492
    Abstract: Embodiments of the present disclosure provide semiconductor device structures and methods of forming the same. The method includes removing a first semiconductor layer disposed between a second semiconductor layer and a third semiconductor layer and performing an oxide refill process to form a seamless dielectric material between the second and third semiconductor layers. The oxide refill process includes exposing the second and third semiconductor layers to a silicon-containing precursor at a first flow rate for a first duration to form a monolayer, and exposing the monolayer to an oxygen-containing precursor at a second flow rate for a second duration to form the seamless dielectric material, the second flow rate is about twice to about 20 times the first flow rate, and the second duration is about twice to about 20 times the first duration.
    Type: Application
    Filed: August 30, 2023
    Publication date: March 6, 2025
    Inventors: Kuei-Lin CHAN, Wei-Ting YEH, Fu-Ting YEN, Yu-Yun PENG, Keng-Chu LIN
  • Publication number: 20250055266
    Abstract: A wire stripper has a first handle, a second handle, a blade set, a spring, and a pair of support blocker plates. The second handle is pivoted to the first handle by a pivot. The blade set has a first blade and a second blade, which are connected to the first handle and the second handle respectively. The blade set is fixed with the first handle or the second handle by a screw. Two ends of the spring are respectively fixed on the first handle and the second handle. An end of each of the support blocker plates is connected to the first handle, and another end thereof is extended to the second handle. The disclosure can provide support to a cutting process and the blade set can be replaced when being worn down.
    Type: Application
    Filed: August 10, 2023
    Publication date: February 13, 2025
    Inventor: Yu-Ting YEN
  • Publication number: 20250031427
    Abstract: A semiconductor device includes a substrate, a dummy gate structure, and a gate structure. The substrate has a dummy gate trench and a gate trench, and includes a first well region, a second well region and a source region. The first well region is formed by doping at least one element from a first element group, and has a first conductive channel. The second well region is formed by doping at least one element from a second element group, the second well region is on the first well region and has a second conductive channel, a polarity of the second conductive channel is opposite to that of the first conductive channel. The dummy gate structure is in the dummy gate trench of the substrate, and a portion of the dummy gate structure is in the first well region. The gate structure is between the adjacent dummy gate structures.
    Type: Application
    Filed: January 3, 2024
    Publication date: January 23, 2025
    Applicant: Industrial Technology Research Institute
    Inventors: Chih-Hung Yen, Hua-Mao Chen, Yu-Ting Chen
  • Publication number: 20250031408
    Abstract: A power semiconductor device includes a semiconductor substrate, a drift layer, a well region, a doped region, two dummy trenches, a gate structure and a dielectric layer. The semiconductor substrate is doped to have a first conductive channel. The drift layer on the semiconductor substrate is doped to have the first conductive channel. The well region on the drift layer is doped to have a second conductive channel having a polarity opposite to that of the first conductive channel. The doped region on the well region is doped to have the first conductive channel. Two dummy trenches pass through the doped region and the well region. Each of the dummy trenches has a dummy gate. The gate structure has a real gate and is between the dummy trenches. The dielectric layer isolates the dummy gate and the real gate from the doped region, the well region and the drift layer.
    Type: Application
    Filed: January 2, 2024
    Publication date: January 23, 2025
    Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
    Inventors: Chih-Hung YEN, Hua-Mao CHEN, Yu-Ting CHEN
  • Publication number: 20240319590
    Abstract: Optical devices and methods of manufacture are presented in which a first mask is utilized for multiple purposes. Some methods include depositing a first mask over a support material, forming a concave surface in the support material through the first mask, and bonding the first mask to a first bonding layer over an optical interposer.
    Type: Application
    Filed: March 20, 2023
    Publication date: September 26, 2024
    Inventors: Yu-Hung Lin, Yu-Yi Huang, Chih-Hao Yu, Yu-Ting Yen, Shih-Peng Tai
  • Publication number: 20240274440
    Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.
    Type: Application
    Filed: April 10, 2024
    Publication date: August 15, 2024
    Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
  • Publication number: 20240258774
    Abstract: A stripping tool includes a fixed handle (10), a fixed clamp plate (20), a movable handle (30), a movable clamp plate (40), a cutting/pulling mechanism (50) and a driving operation mechanism (60). The driving operation mechanism (60) includes a pushing assembly (61), a pressing assembly (62) and an action member (63). One end of the pushing assembly (61) is connected to the moveable handle (30) and another end is moveably connected to the action member (63). The pressing assembly (62) is fixed to the fixed handle (10). One end of the action member (63) is connected to the cutting/pulling mechanism (50) and another end is elastically pressed by the pressing assembly (62). When the movable handle (30) rotates toward the fixed handle (10), the pushing assembly (61) moves the action member (63) and the cutting/pulling mechanism (50) toward the pressing assembly (62) to implement wire stripping.
    Type: Application
    Filed: February 1, 2023
    Publication date: August 1, 2024
    Inventor: Yu-Ting YEN
  • Patent number: 11984323
    Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.
    Type: Grant
    Filed: July 12, 2021
    Date of Patent: May 14, 2024
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
  • Patent number: 11801585
    Abstract: A pliers includes a first pliers body (10) and a second pliers body (20). The first pliers body includes a first handle (11) and a first clamp (12). A first pliers knife (13) and a first pliers back (14) are disposed on the first clamp (12). The second pliers body (20) includes a second handle (21) and a second clamp (22). A second pliers knife (23) and a second pliers back (24) are disposed on the second clamp (22). The second clamp (22) is pivotally connected with the first clamp (12) to clamp or cut. The first pliers back (14) or the second pliers back (24) is provided with a chipping blade (50) configured in a concave arc shape for chipping.
    Type: Grant
    Filed: July 15, 2021
    Date of Patent: October 31, 2023
    Assignee: KAUW YEHI INDUSTRIAL CO., LTD.
    Inventor: Yu-Ting Yen
  • Publication number: 20230015864
    Abstract: A pliers includes a first pliers body (10) and a second pliers body (20). The first pliers body includes a first handle (11) and a first clamp (12). A first pliers knife (13) and a first pliers back (14) are disposed on the first clamp (12). The second pliers body (20) includes a second handle (21) and a second clamp (22). A second pliers knife (23) and a second pliers back (24) are disposed on the second clamp (22). The second clamp (22) is pivotally connected with the first clamp (12) to clamp or cut. The first pliers back (14) or the second pliers back (24) is provided with a chipping blade (50) configured in a concave arc shape for chipping.
    Type: Application
    Filed: July 15, 2021
    Publication date: January 19, 2023
    Inventor: Yu-Ting YEN
  • Publication number: 20210343538
    Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.
    Type: Application
    Filed: July 12, 2021
    Publication date: November 4, 2021
    Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
  • Patent number: 11069533
    Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.
    Type: Grant
    Filed: July 18, 2019
    Date of Patent: July 20, 2021
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
  • Patent number: 10957609
    Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.
    Type: Grant
    Filed: December 17, 2018
    Date of Patent: March 23, 2021
    Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang
  • Publication number: 20210020449
    Abstract: A chemical mechanical planarization (CMP) system including a capacitive deionization module (CDM) for removing ions from a solution and a method for using the same are disclosed. In an embodiment, an apparatus includes a planarization unit for planarizing a wafer; a cleaning unit for cleaning the wafer; a wafer transportation unit for transporting the wafer between the planarization unit and the cleaning unit; and a capacitive deionization module for removing ions from a solution used in at least one of the planarization unit or the cleaning unit.
    Type: Application
    Filed: July 18, 2019
    Publication date: January 21, 2021
    Inventors: Te-Chien Hou, Yu-Ting Yen, Cheng-Yu Kuo, Chih Hung Chen, William Weilun Hong, Kei-Wei Chen
  • Patent number: 10800018
    Abstract: A crimping tool includes a base, a press handle, a slide module, a link and a fixed fix shaft. The base has two first side walls and to sliding space is defined therebetween. One end of the press handle is pivoted at an end of the base. The slide module is slidably accommodated in the sliding space and has a guiding groove. Two ends of the link are pivoted at the press handle and the slide module separately. The fix shaft is disposed across the two first side walls and inserted in the guiding groove. When the press handle drives the slide module sliding in the sliding space through the link, the guiding groove of the slide module will be guided and restricted by the fix shaft. Therefore, the guiding grooves will not be damaged and get dirt.
    Type: Grant
    Filed: April 4, 2018
    Date of Patent: October 13, 2020
    Assignee: KAUW YEHI INDUSTRIAL CO., LTD.
    Inventor: Yu-Ting Yen
  • Patent number: 10461690
    Abstract: A defect inspection method and a defect inspection system for a solar cell are proposed, where the method includes the following steps. Output voltages and output currents of the solar cell are measured by a measuring device. A stepwise current-voltage curve (stepwise IV curve) and a fitted current-voltage curve (fitted IV curve) are generated by a processing device according to the output voltages and the output currents, and whether a first error of the fitted IV curve is less than a first error tolerance is determined by the processing device. When the first error is not less than the first error tolerance, whether there exists at least one surge in steps of the stepwise IV curve is determined by the processing device so as to determine whether the solar cell has a defect. Next, a determined result of the processing device is outputted by the output device.
    Type: Grant
    Filed: December 4, 2017
    Date of Patent: October 29, 2019
    Assignee: Industrial Technology Research Institute
    Inventors: Yean-San Long, En-Yun Wang, Ren-Chin Shr, Yu-Ting Yen, Hsiang-Ying Cheng
  • Publication number: 20190308304
    Abstract: A crimping tool includes a base, a press handle, a slide module, a link and a fixed fix shaft. The base has two first side walls and to sliding space is defined therebetween. One end of the press handle is pivoted at an end of the base. The slide module is slidably accommodated in the sliding space and has a guiding groove. Two ends of the link are pivoted at the press handle and the slide module separately. The fix shaft is disposed across the two first side walls and inserted in the guiding groove. When the press handle drives the slide module sliding in the sliding space through the link, the guiding groove of the slide module will be guided and restricted by the fix shaft. Therefore, the guiding grooves will not be damaged and get dirt.
    Type: Application
    Filed: April 4, 2018
    Publication date: October 10, 2019
    Inventor: Yu-Ting YEN
  • Publication number: 20190173423
    Abstract: A defect inspection method and a defect inspection system for a solar cell are proposed, where the method includes the following steps. Output voltages and output currents of the solar cell are measured by a measuring device. A stepwise current-voltage curve (stepwise IV curve) and a fitted current-voltage curve (fitted IV curve) are generated by a processing device according to the output voltages and the output currents, and whether a first error of the fitted IV curve is less than a first error tolerance is determined by the processing device. When the first error s not less than the first error tolerance, whether there exists at least one surge in steps of the stepwise IV curve is determined by the processing device so as to determine whether the solar cell has a defect. Next, a determined result of the processing device is outputted by the output device.
    Type: Application
    Filed: December 4, 2017
    Publication date: June 6, 2019
    Applicant: Industrial Technology Research Institute
    Inventors: Yean-San Long, En-Yun Wang, Ren-Chin Shr, Yu-Ting Yen, Hsiang-Ying Cheng
  • Publication number: 20190122942
    Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.
    Type: Application
    Filed: December 17, 2018
    Publication date: April 25, 2019
    Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang
  • Patent number: 10157801
    Abstract: A method includes performing Chemical Mechanical Polish (CMP) on a wafer, placing the wafer on a chuck, performing a post-CMP cleaning on the wafer, and determining cleanness of the wafer when the wafer is located on the chuck.
    Type: Grant
    Filed: January 4, 2016
    Date of Patent: December 18, 2018
    Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
    Inventors: Yu-Ting Yen, Chi-Ming Tsai, Hui-Chi Huang