Abstract: In a teeter-totter type MEMS accelerometer, the teeter-totter proof mass and the bottom set of electrodes (i.e., underlying the proof mass) are formed on a device wafer, while the top set of electrodes (i.e., overlying the teeter-totter proof mass) are formed on a circuit wafer that is bonded to the device wafer such that the top set of electrodes overlie the teeter-totter proof mass. The electrodes formed on the circuit wafer may be formed from an upper metallization layer on the circuit wafer, which also may be used to form various electrical connections and/or bond pads.

Abstract: An accelerometer or other motion sensor is used to provide power to an entire processor system such that the processor does not need to be powered to process the motion signals for initial power-on control. After the processor system is powered on, the processor system may receive and process motion signals as normal, including, for example, performing various power-control functions such as power-down of certain components or the entire system upon detection of a lack of motion for a predetermined amount of time.

Abstract: In a teeter-totter type MEMS accelerometer, the teeter-totter proof mass and the bottom set of electrodes (i.e., underlying the proof mass) are formed on a device wafer, while the top set of electrodes (i.e., overlying the teeter-totter proof mass) are formed on a circuit wafer that is bonded to the device wafer such that the top set of electrodes overlie the teeter-totter proof mass. The electrodes formed on the circuit wafer may be formed from an upper metallization layer on the circuit wafer, which also may be used to form various electrical connections and/or bond pads.

Abstract: An accelerometer or other motion sensor is used to provide power to an entire processor system such that the processor does not need to be powered to process the motion signals for initial power-on control. After the processor system is powered on, the processor system may receive and process motion signals as normal, including, for example, performing various power-control functions such as power-down of certain components or the entire system upon detection of a lack of motion for a predetermined amount of time.

Abstract: An apparatus for amplifying differential signals is provided. The apparatus comprises a differential amplifier, a first impedance component, a second impedance component, a voltage source and a high-pass filter. The differential amplifier receives an input differential signal with a first terminal and a second terminal. The differential amplifier also drains currents from the voltage source into a third terminal and a fourth terminal via the first and the second impedance components respectively. The high-pass filter receives the input differential signal and outputs a control differential signal to control the first and the second impedance components so that the impedance of the first and the second impedance components vary inversely in response to the voltages at the first and the second terminals respectively when the state of the input differential signal changes.

Abstract: An apparatus for amplifying differential signals is provided. The apparatus comprises a differential amplifier, a first impedance component, a second impedance component, a voltage source and a high-pass filter. The differential amplifier receives an input differential signal with a first terminal and a second terminal. The differential amplifier also drains currents from the voltage source into a third terminal and a fourth terminal via the first and the second impedance components respectively. The high-pass filter receives the input differential signal and outputs a control differential signal to control the first and the second impedance components so that the impedance of the first and the second impedance components vary inversely in response to the voltages at the first and the second terminals respectively when the state of the input differential signal changes.