Patents by Inventor Yu-Yi Wu

Yu-Yi Wu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20050288810
    Abstract: A system and method for automatic SPC chart generation including a storage device and a data acquisition module. The storage device stores a chamber management tree, a recipe window management tree, a parameter configuration table and multiple chart profile records. The data acquisition module, which resides in a memory, acquires multiple process events and parameter values corresponding to the process events and a process parameter, selects a relevant statistical algorithm, calculates a statistical value by applying the statistical algorithm to the parameter values, creates a new chart profile record and a parameter statistics record therein if the chart profile record is absent, and stores the statistical values and measured time in the parameter statistics record.
    Type: Application
    Filed: June 24, 2004
    Publication date: December 29, 2005
    Inventors: Mu-Tsang Lin, Tien-Wen Wang, Joseph Fang, Ie-Fun Lai, Chon-Hwa Chu, Jian-Hong Chen, Chin-Chih Chen, Yu-Yi Wu, Yao-Wen Wu, Wen-Sheng Chien
  • Patent number: 6965432
    Abstract: An apparatus and method for detecting mispositioned wafers attributable to transfer shift of the wafer are disclosed. A calibration wafer has a target region comprising a pattern of optically distinguishable features from which is determined the position of the calibration wafer within the chamber subsequent to its transfer therein. Preferably, the features comprise a pattern of colors that can be detected by spectroscopy. A preferred form and manner of providing such color features is by way of dielectric thin film filters.
    Type: Grant
    Filed: June 7, 2002
    Date of Patent: November 15, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Yi Wu, Kun-Ei Chen, San-Ching Lin
  • Patent number: 6938505
    Abstract: An apparatus and method for detecting in chamber wafer position and process status are disclosed. A chamber includes a processing pedestal and plurality of lift pins. Each lift pin has an associated load cell for measuring the load exerted by the wafer on the lift pins. Mispositioned wafers or broken wafers will result in load measurements outside of expected ranges. Position of the wafer may be determined from the load distribution sensed on the lift pins.
    Type: Grant
    Filed: August 13, 2002
    Date of Patent: September 6, 2005
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuen-Ei Chen, Yu-Yi Wu, Chia-Hung Chung
  • Publication number: 20040031338
    Abstract: An apparatus and method for detecting in chamber wafer position and process status are disclosed. A chamber includes a processing pedestal and plurality of lift pins. Each lift pin has an associated load cell for measuring the load exerted by the wafer on the lift pins. Mispositioned wafers or broken wafers will result in load measurements outside of expected ranges. Position of the wafer may be determined from the load distribution sensed on the lift pins.
    Type: Application
    Filed: August 13, 2002
    Publication date: February 19, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Kuen-Ei Chen, Yu-Yi Wu, Chia-Hung Chung
  • Publication number: 20030227624
    Abstract: An apparatus and method for detecting mispositioned wafers attributable to transfer shift of the wafer are disclosed. A calibration wafer has a target region comprising a pattern of optically distinguishable features from which is determined the position of the calibration wafer within the chamber subsequent to its transfer therein. Preferably, the features comprise a pattern of colors that can be detected by spectroscopy. A preferred form and manner of providing such color features is by way of dielectric thin film filters.
    Type: Application
    Filed: June 7, 2002
    Publication date: December 11, 2003
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Yu-Yi Wu, Kun-Ei Chen, San-Ching Lin