Abstract: A composition for treating Fabry disease, which includes a polynucleotide having gene editing function for correction of the specific mutation (IVS4+919 G>A) of GLA gene. A method for treating Fabry disease, which uses gene editing systems for correction of the specific mutation (IVS4+919 G>A) of GLA gene in Fabry disease.

Abstract: An Equipment Front End Module (EFEM) having a Front Opening Unified Pod (FOUP) dock and a tool access port, includes a robotic wafer handling system configured to transfer silicon wafers between a FOUP coupled to the FOUP dock and a process tool positioned for access via the tool access port. An air curtain system inside the EFEM is positioned to produce an air curtain across the tool access port while the port is open, acting to isolate the interior of the EFEM from the tool environment, and prevent passage of airborne contaminants into the EFEM via the access port.

Abstract: An Equipment Front End Module (EFEM) having a Front Opening Unified Pod (FOUP) dock and a tool access port, includes a robotic wafer handling system configured to transfer silicon wafers between a FOUP coupled to the FOUP dock and a process tool positioned for access via the tool access port. An air curtain system inside the EFEM is positioned to produce an air curtain across the tool access port while the port is open, acting to isolate the interior of the EFEM from the tool environment, and prevent passage of airborne contaminants into the EFEM via the access port.

Abstract: A semiconductor apparatus is provided. The semiconductor apparatus includes a process chamber, a wafer chuck disposed in the process chamber, and an exhaust device. The exhaust device includes an exhaust tube that communicates with the process chamber, and a valve mechanism installed on the exhaust tube and configured to control the flow rate in the exhaust tube. The semiconductor apparatus further includes a cleaning-gas-supply device including a first cleaning tube that communicates with the process chamber, and a second cleaning tube that communicates with the exhaust device. When a cleaning process is performed, the cleaning-gas-supply device supplies a cleaning gas into the process chamber via the first cleaning tube, and into the valve mechanism via the second cleaning tube.

Abstract: A UV curing system includes an enclosure defining an interior, a UV radiation source disposed within the interior of the enclosure, and a first window disposed within the interior of the enclosure. The first window creates a barrier that separates the UV radiation source and a processing chamber. A second window is disposed within the interior of the enclosure at a distance from the first window to define a gas channel. The second window defines a plurality of openings such that the gas channel is in fluid communication with the processing chamber. A gas inlet conduit is in fluid communication with the gas channel and is configured to introduce a cooling gas into the gas channel. A gas outlet is in fluid communication with the processing chamber and is configured to remove gas from the processing chamber.

Abstract: A UV curing system includes an enclosure defining an interior, a UV radiation source disposed within the interior of the enclosure, and a first window disposed within the interior of the enclosure. The first window creates a barrier that separates the UV radiation source and a processing chamber. A second window is disposed within the interior of the enclosure at a distance from the first window to define a gas channel. The second window defines a plurality of openings such that the gas channel is in fluid communication with the processing chamber. A gas inlet conduit is in fluid communication with the gas channel and is configured to introduce a cooling gas into the gas channel. A gas outlet is in fluid communication with the processing chamber and is configured to remove gas from the processing chamber.

Abstract: A wafer curing apparatus including a plate configured to pass ultraviolet light. The wafer curing apparatus further includes an antireflective coating on a light incident surface of the plate. The antireflective coating has an opening in a central portion thereof. A method of curing a wafer including emitting ultraviolet light from an ultraviolet light source. The method further includes transmitting the ultraviolet light through an ultraviolet transmissive plate having an antireflective coating thereon. The antireflective coating including an opening in a central portion thereof. The method further includes irradiating a wafer with the ultraviolet light transmitted through the ultraviolet transmissive plate.