Patents by Inventor Yu-Zhong LIN

Yu-Zhong LIN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • STRESS MODULATION OF SEMICONDUCTOR THIN FILM
    Publication number: 20150255308
    Abstract: An embodiment discloses a method for modulating stress of a semiconductor film and comprises the steps of: providing a substrate; forming a semiconductor film on the substrate; performing an annealing treatment to the formed semiconductor film; and determining a residual stress of the semiconductor film at a certain compress strain, a certain tensile strain, or zero by controlling a temperature of the annealing treatment.
    Type: Application
    Filed: June 25, 2014
    Publication date: September 10, 2015
    Applicant: NATIONAL TAIWAN UNIVERSITY
    Inventors: CHING-FUH LIN, Yu-Wen CHENG, Yu-Zhong LIN