Abstract: The present disclosure provides a probe card, and a supporting structure and probe structure thereof. The probe card includes: a substrate, the supporting structure and a probe structure. The supporting structure includes: a main body and a protrusion part. The probe structure includes a plurality of cantilever probes. The main body has a main opening and is disposed on the substrate. The protrusion part is configured to support the cantilever probes, is disposed on the main body and protrude toward to an inner of the main opening for forming a stepped channel in the opening.

Abstract: A probe card for high-frequency testing is provided. The probe card includes a substrate, a flexible substrate, a probe, and at least one movable conductive pillar. The substrate has a first surface, a second surface, and at least one first through hole. The flexible substrate is disposed on the second surface of the substrate and has at least one second through hole. The second through hole and the first through hole correspond to each other. The probe is disposed on the second surface of the substrate, and is electrically connected to the flexible substrate. The movable conductive pillar movably passes through the first through hole and the second through hole.