Patents by Inventor Yuan Xiaoxiong

Yuan Xiaoxiong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • BASE PLATE FOR HEATER PEDESTAL
    Publication number: 20230207345
    Abstract: Embodiments of the disclosure advantageously provide base plates with decreased metal contamination. Some embodiments of the disclosure advantageously provide base plates with increased edge purge channel uniformity. Some embodiments provide methods of forming base plates. Embodiments of the disclose are directed to a heater pedestal configured to support a substrate during processing. In some embodiments, the heater pedestal includes the base plate described herein.
    Type: Application
    Filed: December 23, 2021
    Publication date: June 29, 2023
    Applicant: Applied Materials, Inc.
    Inventors: Muhannad Mustafa, Mario D. Silvetti, Michael Jerry Duret, Sanjeev Baluja, Satish Radhakrishnan, Yuan Xiaoxiong