Patents by Inventor Yuanbo Kong

Yuanbo Kong has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Holding device for an optical element with support force equalization
    Patent number: 7609464
    Abstract: Holding devices for optical elements, as well as related modules, systems and methods are disclosed. The devices, modules, systems and methods may, for example, be used in the context of microlithography used in manufacturing microelectronic circuits.
    Type: Grant
    Filed: August 17, 2007
    Date of Patent: October 27, 2009
    Assignee: Carl Zeiss SMT AG
    Inventors: Klaus Rief, Yuanbo Kong
  • HOLDING DEVICE FOR AN OPTICAL ELEMENT WITH SUPPORT FORCE EQUALIZATION
    Publication number: 20080043349
    Abstract: Holding devices for optical elements, as well as related modules, systems and methods are disclosed. The devices, modules, systems and methods may, for example, be used in the context of microlithography used in manufacturing microelectronic circuits.
    Type: Application
    Filed: August 17, 2007
    Publication date: February 21, 2008
    Applicant: CARL ZEISS SMT AG
    Inventors: Klaus Rief, Yuanbo Kong