Patents by Inventor Yuanming MENG

Yuanming MENG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and system for fabricating a semiconductor device
    Patent number: 11087982
    Abstract: The present disclosure provides a method and system for fabricating a semiconductor device. The method and system of the present disclosure, after obtaining the polysilicon layer, first form the protective oxide layer on the surface of the polysilicon layer, and then etch the protective oxide layer and the protrusions on the surface of the polysilicon layer with the buffered oxide etchant based on controllability of the buffered oxide etchant, thereby reducing the protrusions on the surface of the polysilicon layer, while well protecting the surface of the polysilicon layer. Therefore, the technical problem of surface roughness in the existing polysilicon layers is solved.
    Type: Grant
    Filed: May 14, 2019
    Date of Patent: August 10, 2021
    Assignee: WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
    Inventors: Yuanming Meng, Yu Yan
  • METHOD AND SYSTEM FOR FABRICATING A SEMICONDUCTOR DEVICE
    Publication number: 20210013036
    Abstract: The present disclosure provides a method and system for fabricating a semiconductor device. The method and system of the present disclosure, after obtaining the polysilicon layer, first form the protective oxide layer on the surface of the polysilicon layer, and then etch the protective oxide layer and the protrusions on the surface of the polysilicon layer with the buffered oxide etchant based on controllability of the buffered oxide etchant, thereby reducing the protrusions on the surface of the polysilicon layer, while well protecting the surface of the polysilicon layer. Therefore, the technical problem of surface roughness in the existing polysilicon layers is solved.
    Type: Application
    Filed: May 14, 2019
    Publication date: January 14, 2021
    Inventors: Yuanming MENG, Yu YAN